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Multi-scale indentation model of stiff film-compliant substrate structures

文献类型：期刊论文

作者Liu, Yanwei; Ma HS(马寒松); Long, Hao; Wei, Shiyuan; Zhang, Siyuan; Wei, Yueguang
刊名APPLIED MATHEMATICAL MODELLING
出版日期2023-06
卷号119页码:566-585
关键词Multi -scale indentation model Stiff film -compliant substrate structures Strain gradient theory Surface elastic model Size effect
ISSN号0307-904X
DOI10.1016/j.apm.2023.02.035
英文摘要As critical components or platforms, stiff film-compliant substrate structures are widely used in micro-electro-mechanical systems (MEMS) and other devices, in which their in-dentation behavior plays an important role. In this work, a multi-scale indentation model (MSI) for stiff film-compliant substrate structures is established based on the strain gradi-ent theory and the surface elastic model. With this model, the indentation size effect of the structure is investigated from three aspects: the load-depth relationship, the distribu-tion of bending moments in the film, and the surface morphology. The results show that the indentation size effect is mainly caused by the characteristic length and the surface residual stress of the film, and it is sensitive to the modulus ratio of the film to the sub-strate but has little relation with Poisson's ratio and the contact radius. Based on the above analysis, two dimensionless numbers are proposed to evaluate the indentation size effect of stiff film-compliant substrate structures. Besides, the predicted bending stiffness by the theoretical model is consistent with the experimental result, which verifies the effective-ness of the MSI model. Our research sheds light on the understanding of the indentation size effect of stiff film-compliant substrate structures and provides theoretical guidance for the design of related devices. (c) 2023 Elsevier Inc. All rights reserved.
分类号一类
WOS研究方向WOS:000971337900001
语种英语
资助机构Postdoctoral Science Foundation of China for Innovative Talents [BX20220 0 08] ; National Natural Science Foundation of China [11890681, 12032001, 11521202, 12202007]
其他责任者Wei, YG
源URL[http://dspace.imech.ac.cn/handle/311007/92237]  
专题力学研究所_非线性力学国家重点实验室
作者单位1.(Wei Shiyuan) Peking Univ China Acad Adv Interdisciplinary Studies Beijing 100871 Peoples R China
2.(Ma Hansong) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech Beijing 100190 Peoples R China
3.(Wei Shiyuan) Peking Univ Coll Engn Dept Biomed Engn Beijing 100871 Peoples R China
4.(Zhang Siyuan) Univ Shanghai Sci & Technol Sch Mech Engn Shanghai 200093 Peoples R China
5.(Liu Yanwei, Long Hao, Wei Yueguang) Peking Univ Coll Engn Dept Mech & Engn Sci B ESAT Beijing 100871 Peoples R China
推荐引用方式
GB/T 7714		 Liu, Yanwei,Ma HS,Long, Hao,et al. Multi-scale indentation model of stiff film-compliant substrate structures[J]. APPLIED MATHEMATICAL MODELLING,2023,119:566-585.
APA Liu, Yanwei,马寒松,Long, Hao,Wei, Shiyuan,Zhang, Siyuan,&Wei, Yueguang.(2023).Multi-scale indentation model of stiff film-compliant substrate structures.APPLIED MATHEMATICAL MODELLING,119,566-585.
MLA Liu, Yanwei,et al."Multi-scale indentation model of stiff film-compliant substrate structures".APPLIED MATHEMATICAL MODELLING 119(2023):566-585.

入库方式： OAI收割

来源：力学研究所

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