The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications
文献类型：期刊论文
| 作者 | Y. Wang; X. H. Fu; Y. Y. Chen; L. Qin; Y. Q. Ning and L. J. Wang |
| 刊名 | Applied Sciences-Basel
 |
| 出版日期 | 2022 |
| 卷号 | 12期号:13页码:31 |
| DOI | 10.3390/app12136503 |
| 英文摘要 | The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/66558]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y. Wang,X. H. Fu,Y. Y. Chen,et al. The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications[J]. Applied Sciences-Basel,2022,12(13):31. |
| APA | Y. Wang,X. H. Fu,Y. Y. Chen,L. Qin,&Y. Q. Ning and L. J. Wang.(2022).The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications.Applied Sciences-Basel,12(13),31. |
| MLA | Y. Wang,et al."The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications".Applied Sciences-Basel 12.13(2022):31. |
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