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Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage

文献类型：期刊论文

作者M. S. Cao; Y. M. Bo and H. B. Gao
刊名International Journal of Control Automation and Systems
出版日期2022
卷号20期号:3页码:741-749
ISSN号1598-6446
DOI10.1007/s12555-020-0564-9
英文摘要Iterative learning control (ILC) is an efficient technique applicable to improving the tracking performance of systems that have a repetitive nature. In this paper, point-to-point movements with time-iteration-varying disturbances are considered instead. A new output-based adaptive ILC scheme consisting of an adaptive second-order ILC and an iterative learning estimation of time-iteration-varying disturbances is proposed for a class of linear systems with unknown parameters. The proposed algorithm is used to improve trajectory tracking performance without requiring a plant model or a sensitivity function, and without assuming the initial condition to be zero. In order to verify the proposed algorithm, it is applied to a wafer stage, and the obtained tracking performance is compared with that obtained using a traditional second-order ILC algorithm; better results are obtained using the proposed method.
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语种英语
源URL[http://ir.ciomp.ac.cn/handle/181722/66965]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714		 M. S. Cao,Y. M. Bo and H. B. Gao. Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage[J]. International Journal of Control Automation and Systems,2022,20(3):741-749.
APA M. S. Cao,&Y. M. Bo and H. B. Gao.(2022).Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage.International Journal of Control Automation and Systems,20(3),741-749.
MLA M. S. Cao,et al."Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage".International Journal of Control Automation and Systems 20.3(2022):741-749.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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