Polarization-modulated grating interferometer by conical diffraction
文献类型：期刊论文
| 作者 | L. Liu; Z. W. Liu; S. Jiang; W. Wang; H. Z. Yu; Y. X. Jiang and W. H. Li |
| 刊名 | Optics Express
 |
| 出版日期 | 2022 |
| 卷号 | 30期号:2页码:689-699 |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.438490 |
| 英文摘要 | The grating interferometer in the Littrow configuration uses quarter wave plates (QWPs) to modulate the polarization in the measurement system to determine the autocollimation optical path. Fabrication errors and mounting errors of the QWPs lead to phase changes in the grating interferometer that generate measurement errors. As an alternative, we propose a grating interferometer that produces conical diffraction. Using the grating instead of QWPs to modulate the beam's polarization bypasses this source of error. A 45 mm range experiment was performed that yielded a repeated measurement error of 40 nm. Experiments show that the system has a simple structure and good repeatability and is capable of high-precision displacement measurements. (C) 2022 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/66995]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | L. Liu,Z. W. Liu,S. Jiang,et al. Polarization-modulated grating interferometer by conical diffraction[J]. Optics Express,2022,30(2):689-699. |
| APA | L. Liu,Z. W. Liu,S. Jiang,W. Wang,H. Z. Yu,&Y. X. Jiang and W. H. Li.(2022).Polarization-modulated grating interferometer by conical diffraction.Optics Express,30(2),689-699. |
| MLA | L. Liu,et al."Polarization-modulated grating interferometer by conical diffraction".Optics Express 30.2(2022):689-699. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。