中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Three-step self-calibrating generalized phase-shifting interferometry

文献类型:期刊论文

作者Y. Zhang
刊名Chinese Physics B
出版日期2022
卷号31期号:3页码:7
ISSN号1674-1056
DOI10.1088/1674-1056/ac21c5
英文摘要An accurate and fast three-step self-calibrating generalized phase-shifting interferomertry (SGPSI) is proposed. In this approach, two new phase-shifting signals are constructed by the difference interferograms normalization and noise suppressing, then the unknown phase shift between the two difference phase-shifting signals is estimated quickly through searching the minimum coefficient of variation of the modulation amplitude, a limited number of pixels are selected to participate in the search process to further save time, and finally the phase is reconstructed through the searched phase shift. Through the reconstruction of phase map by the simulation and experiment, and the comparison with several mature algorithms, the good performance of the proposed algorithm is proved, and it eliminates the limitation of requiring more than three phase-shifting interferograms for high-precision SGPSI. We expect this method to be widely used in the future.
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语种英语
源URL[http://ir.ciomp.ac.cn/handle/181722/67175]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
Y. Zhang. Three-step self-calibrating generalized phase-shifting interferometry[J]. Chinese Physics B,2022,31(3):7.
APA Y. Zhang.(2022).Three-step self-calibrating generalized phase-shifting interferometry.Chinese Physics B,31(3),7.
MLA Y. Zhang."Three-step self-calibrating generalized phase-shifting interferometry".Chinese Physics B 31.3(2022):7.

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

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