Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging
文献类型：期刊论文
| 作者 | L. X. Zhang; Y. Z. Li; B. S. Chen; Y. B. Wang; H. M. Li; Y. Hou; M. Tao; Y. X. Li; Z. H. Zhi; X. B. Liu |
| 刊名 | Optics Express
 |
| 出版日期 | 2022 |
| 卷号 | 30期号:4页码:5008-5018 |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/oe.446733 |
| 英文摘要 | Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate a two-dimensional scanning range of 96 degrees x14.4 degrees and 690 mW peak power of the main lobe. Additionally, we set up the time of flight (ToF) and frequency-modulated continuous-wave (FMCW) ranging systems by using this optical phased array chip, and achieve the objects detection at the range of 20 m in the ToF system and 109 m in the FMCW system, respectively. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/67202]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | L. X. Zhang,Y. Z. Li,B. S. Chen,et al. Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging[J]. Optics Express,2022,30(4):5008-5018. |
| APA | L. X. Zhang.,Y. Z. Li.,B. S. Chen.,Y. B. Wang.,H. M. Li.,...&G. Q. Lo and J. F. Song.(2022).Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging.Optics Express,30(4),5008-5018. |
| MLA | L. X. Zhang,et al."Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging".Optics Express 30.4(2022):5008-5018. |
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