Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications
文献类型:期刊论文
作者 | Hao, Yansheng4; Fang, Chaoying4; Yuan, Yapeng3; Okano, Kazunori4; Yasukuni, Ryohei4; Cheng, Shaokoon2; Tanaka, Yo3; Hosokawa, Yoichiroh4; Yang, Yang1![]() |
刊名 | IEEE SENSORS JOURNAL
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出版日期 | 2023-01-15 |
卷号 | 23期号:2页码:1 |
关键词 | Femtosecond laser flow velocity microfluidic device ultrathin glass fabrication |
ISSN号 | 1558-1748 |
文献子类 | 期刊论文 |
英文摘要 | Here we developed an innovative flow sensor using ultrathin (i.e., 4 mu m) glass sheet fabricated by femtosecond laser processing. The sensor can quantify the flow velocity of liquid flows by measuring the displacement and vibration frequency of the ultrathin glass sheet induced by flows in the microchannel. The developed flow sensor is transparent, chemically inert, and can measure water flows with a velocity between 0.067 and 0.804 m/s (Reynolds numbers 3-36). The displacement of the ultrathin glass sensor varying from 0.4 to 3.1 mu m has negligible influence on the fluid conditions in themicrochannel. Moreover, the sensitivity and dynamic range of the sensor can be readily adjusted by optimizing geometric parameters, such as the aspect ratio and thickness of the ultrathin glass sheet. Besides, the sensor is capable of multiposition measurement to investigate the differences in localized flow velocity within the microchannel. Compared with existing cantilever-based flow velocity sensors, our developed sensor has a higher sensitivity [409 mV/(m/s)], a larger measurement range (0.067- 0.804 m/s), and a smaller displacement range (0.4-3.1 mu m), which is desirable for high-throughputmicrofluidics-based applications, such as cell separation and cell-based therapeutics. |
WOS研究方向 | Engineering ; Instruments & Instrumentation ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000928201800025 |
版本 | 出版稿 |
源URL | [http://ir.idsse.ac.cn/handle/183446/10170] ![]() |
专题 | 深海工程技术部_深海资源开发研究室 |
作者单位 | 1.Chinese Acad Sci, Inst Deep Sea Sci & Engn, Sanya 572000, Hainan, Peoples R China 2.Macquarie Univ, Sch Engn, Sydney, NSW 2122, Australia; 3.RIKEN, Ctr Biosyst Dynam Res BDR, Suita, Osaka 5650871, Japan; 4.Nara Inst Sci & Technol, Div Mat Sci, Nara 6300192, Japan; |
推荐引用方式 GB/T 7714 | Hao, Yansheng,Fang, Chaoying,Yuan, Yapeng,et al. Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications[J]. IEEE SENSORS JOURNAL,2023,23(2):1. |
APA | Hao, Yansheng.,Fang, Chaoying.,Yuan, Yapeng.,Okano, Kazunori.,Yasukuni, Ryohei.,...&Yalikun, Yaxiaer.(2023).Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications.IEEE SENSORS JOURNAL,23(2),1. |
MLA | Hao, Yansheng,et al."Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications".IEEE SENSORS JOURNAL 23.2(2023):1. |
入库方式: OAI收割
来源:深海科学与工程研究所
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