Support compliance: A non-ignorable factor for cantilever sensors for MEMS application
文献类型：期刊论文
| 作者 | Li, Diao-Feng; Li, Nan; Bai, Chun-Guang; Zhang, Zhi-Qiang; Zhao, Jian |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2022-10-16 |
| 卷号 | 346页码:4 |
| 关键词 | Cantilever beam Support compliance Elastic properties Metallic glass MEMS |
| ISSN号 | 0924-4247 |
| DOI | 10.1016/j.sna.2022.113867 |
| 通讯作者 | Bai, Chun-Guang(cgbai@imr.ac.cn) |
| 英文摘要 | Support compliance at the fixed end of cantilever beams has significant effects on the measured modulus of elasticity in bending (Eb) and accurate deflection response. Additional deflection caused by support compliance is an easily neglected but an inevitable factor, which results in the large errors of the measured Eb. An effective strategy to design cantilever sensors was proposed by enhancing the loading distance, which not only improve the sensitivity, but also weaken the support compliance effect. In a nutshell, the support compliance effect must be taken into accounted by engineers carefully to improve the accuracy of the measured Eb and deflection response for cantilever sensors which used in MEMS. |
| 资助项目 | National Key Research and Devel- opment Program of China ; [2017YFB0306201] |
| WOS研究方向 | Engineering ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000876009300005 |
| 出版者 | ELSEVIER SCIENCE SA |
| 资助机构 | National Key Research and Devel- opment Program of China |
| 源URL | [http://ir.imr.ac.cn/handle/321006/176516]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Bai, Chun-Guang |
| 作者单位 | Chinese Acad Sci, Inst Met Res, Shi Changxu Innovat Ctr Adv Mat, 72 Wenhua Rd, Shenyang 110016, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,et al. Support compliance: A non-ignorable factor for cantilever sensors for MEMS application[J]. SENSORS AND ACTUATORS A-PHYSICAL,2022,346:4. |
| APA | Li, Diao-Feng,Li, Nan,Bai, Chun-Guang,Zhang, Zhi-Qiang,&Zhao, Jian.(2022).Support compliance: A non-ignorable factor for cantilever sensors for MEMS application.SENSORS AND ACTUATORS A-PHYSICAL,346,4. |
| MLA | Li, Diao-Feng,et al."Support compliance: A non-ignorable factor for cantilever sensors for MEMS application".SENSORS AND ACTUATORS A-PHYSICAL 346(2022):4. |
入库方式： OAI收割
来源：金属研究所
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