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Mechanical properties evaluation of diamond films via nanoindentation

文献类型：期刊论文

作者Xiong, Jiaji1,2; Liu, Lusheng1; Song, Haozhe1; Wang, Mengrui1,3; Hu, Tianwen1; Zhai, Zhaofeng1; Yang, Bing1; Jiang, Xin1; Huang, Nan1,2
刊名DIAMOND AND RELATED MATERIALS
出版日期2022-12-01
卷号130页码:9
关键词Diamond film Nanoindentation Hardness Elastic modulus Hot filament CVD
ISSN号0925-9635
DOI10.1016/j.diamond.2022.109403
通讯作者Jiang, Xin(xjiang@imr.ac.cn) ; Huang, Nan(nhuang@imr.ac.cn)
英文摘要Diamond film is considered ideal tool coating material for processing difficult-to-machine materials due to the high hardness and wear resistance. However, precisely evaluating the mechanical properties of diamond films has been a considerable obstacle, which hinders further design and application. In this work, various diamond films were deposited on cemented carbide substrates ranging from 0.1 to 1.0 kPa in CH4/H2 by hot filament chemical vapor deposition. The mechanical properties of diamond films were systematically and rigorously evaluated by nanoindentation adopting a series of loads. However, it is found that hardness calculated at different loads has a significant deviation, although all obey the well-known 10 % rule of thumb. On basis of the massive nanoindentation on polished diamond film with roughness <20 nm, we propose a stricter 5 %, instead of the well-known 10 % rule of thumb, for the limit of maximum penetration depth divided by film thickness in the diamond nanoindentation measurements. Notably, the mechanical properties of the deposited diamond films improved as the pressure increased, especially hardness gradually increased from 75.5 +/- 1.4 GPa to 87.3 +/- 5.0 GPa, which is attributed to the increase of the ratio of sp3 carbon content.
资助项目STS project of the Fujian Province ; Instrument Development Project of Shenyang National Laboratory for Materials Science[L2020E08] ; Chinese Academy of Sciences[2020T3001]
WOS研究方向Materials Science ; Physics
语种英语
WOS记录号WOS:000880016900002
出版者ELSEVIER SCIENCE SA
资助机构STS project of the Fujian Province ; Instrument Development Project of Shenyang National Laboratory for Materials Science ; Chinese Academy of Sciences
源URL[http://ir.imr.ac.cn/handle/321006/176590]  
专题金属研究所_中国科学院金属研究所
通讯作者Jiang, Xin; Huang, Nan
作者单位1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Wenhua Rd 72, Shenyang 110016, Peoples R China
2.Univ Sci & Technol China, Sch Mat Sci & Engn, Wenhua Rd 72, Shenyang 110016, Peoples R China
3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
推荐引用方式
GB/T 7714		 Xiong, Jiaji,Liu, Lusheng,Song, Haozhe,et al. Mechanical properties evaluation of diamond films via nanoindentation[J]. DIAMOND AND RELATED MATERIALS,2022,130:9.
APA Xiong, Jiaji.,Liu, Lusheng.,Song, Haozhe.,Wang, Mengrui.,Hu, Tianwen.,...&Huang, Nan.(2022).Mechanical properties evaluation of diamond films via nanoindentation.DIAMOND AND RELATED MATERIALS,130,9.
MLA Xiong, Jiaji,et al."Mechanical properties evaluation of diamond films via nanoindentation".DIAMOND AND RELATED MATERIALS 130(2022):9.

入库方式： OAI收割

来源：金属研究所

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