Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices
文献类型：期刊论文
| 作者 | Wang, Zhe-Xuan2; Liang, Fei1; Zhang, Guang-Ping1; Zhang, Bin2 |
| 刊名 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2023-03-01 |
| 卷号 | 138页码:129-137 |
| 关键词 | Laminated composites MEMS Strength Plasticity High temperature |
| ISSN号 | 1005-0302 |
| DOI | 10.1016/j.jmst.2022.08.008 |
| 通讯作者 | Zhang, Guang-Ping(gpzhang@imr.ac.cn) ; Zhang, Bin(zhangb@atm.neu.edu.cn) |
| 英文摘要 | There is an increasing demand for materials with excellent mechanical performance for Micro-Electro-Mechanical System (MEMS) devices serving at elevated temperatures. However, how to enhance the high-temperature strength of the materials without losing their plasticity is a pending problem. Here, the Ni/Ni-W laminated composites with different monolayer thicknesses and the same ratio of the con-stituent layer thicknesses were fabricated successfully by using the dual-bath electrodeposition technique. The microstructure stability and tensile properties of annealed Ni/Ni-W laminated composites with dif-ferent monolayer thicknesses were investigated at 400 degrees C. The results show that the annealed Ni0.5/Ni-W0.05 laminated composites have both high yield strength (450 MPa) and excellent elongation to failure (25.1%) at 400 degrees C, being superior to that of the monotonic Ni (179 MPa and 17.7%). Such a high strength of the laminated composite at 400 degrees C results from the contribution of the intrinsically high strength of the Ni-W layers with excellent thermal stability, the thickness-constrained effect on grain growth of Ni layers and the interface coupling effect of heterogeneous structures. The good plasticity may be derived from the heterogeneous laminated structure and the decrease in the constituent layer thickness, provid-ing a good co-deformation ability. Basic mechanisms for the high tensile strength and good plasticity of the Ni/Ni-W laminated composites at 400 degrees C were analyzed theoretically. The findings reveal a poten-tial strategy to fabricate MEMS components with excellent high-temperature tensile properties through tailoring the microstructure thermal stability and the constituent layer scale.(c) 2022 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology. |
| 资助项目 | National Natural Science Foundation of China ; Fundamen- tal Research Project of Shenyang National Laboratory for Materials Science ; [51971060] ; [L2019R18] |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:000884395400004 |
| 出版者 | JOURNAL MATER SCI TECHNOL |
| 资助机构 | National Natural Science Foundation of China ; Fundamen- tal Research Project of Shenyang National Laboratory for Materials Science |
| 源URL | [http://ir.imr.ac.cn/handle/321006/176692]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Zhang, Guang-Ping; Zhang, Bin |
| 作者单位 | 1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Northeastern Univ, Sch Mat Sci & Engn, Minist Educ, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Zhe-Xuan,Liang, Fei,Zhang, Guang-Ping,et al. Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2023,138:129-137. |
| APA | Wang, Zhe-Xuan,Liang, Fei,Zhang, Guang-Ping,&Zhang, Bin.(2023).Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,138,129-137. |
| MLA | Wang, Zhe-Xuan,et al."Enhancing high-temperature tensile properties of Ni/Ni-W laminated composites for MEMS devices".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 138(2023):129-137. |
入库方式： OAI收割
来源：金属研究所
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