Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection
文献类型：期刊论文
| 作者 | Zhao, Zhujie3; Lei, Cheng3; Liang, Ting3; Zhang, Junna3; Liu, Yuqiao3; Ghaffar, Abdul1,2; Xiong, Jijun3 |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2023-03-01 |
| 卷号 | 14期号:3页码:- |
| 关键词 | gas sensor MEMS FAIMS anodic bonding VOC gas detection |
| 英文摘要 | Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in detection, low in power consumption, and can work continuously. The sensor was fabricated through the MEMS process, a specific process which included photolithography, etching, anodic bonding, etc. The sensor is 5160 mu m long, 5300 mu m wide and 800 mu m high. We built a test system to detect two typical VOC gases: isobutylene and acetone. The results show that in the detection of isobutylene gas and acetone gas, the sensor voltage value changes with the change of gas concentration. The linearity of testing isobutylene is 0.961, and the linearity of testing acetone is 0.987. When the isobutylene gas concentration is 50 ppm, the response time is 8 s and the recovery time is 6 s; when the acetone gas concentration is 50 ppm, the response time is 9 s and the recovery time is 10 s. In addition, the sensor demonstrates good repeatability and stability, which are conducive to the detection of VOCs in the environment. |
| 学科主题 | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| 语种 | 英语 |
| 出版者 | MDPI |
| WOS记录号 | WOS:000960224100001 |
| 源URL | [http://119.78.100.198/handle/2S6PX9GI/35181]  |
| 专题 | 中科院武汉岩土力学所 |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing 100049, China 2.State Key Laboratory of Geomechanics and Geotechnical Engineering, Institute of Rock and Soil Mechanics, Chinese Academy of Sciences, Wuhan 430071, China 3.State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China |
| 推荐引用方式 GB/T 7714 | Zhao, Zhujie,Lei, Cheng,Liang, Ting,et al. Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection[J]. MICROMACHINES,2023,14(3):-. |
| APA | Zhao, Zhujie.,Lei, Cheng.,Liang, Ting.,Zhang, Junna.,Liu, Yuqiao.,...&Xiong, Jijun.(2023).Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection.MICROMACHINES,14(3),-. |
| MLA | Zhao, Zhujie,et al."Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection".MICROMACHINES 14.3(2023):-. |
入库方式： OAI收割
来源：武汉岩土力学研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。