X-ray performance of a small pixel size sCMOS sensor and the effect of depletion depth
文献类型：期刊论文
| 作者 | Hsiao, Y; Ling, Z; Zhang, C; Wang, W ; Zhou, Q; Wang, X; Zhanga, SN; Yuan, W
|
| 刊名 | JOURNAL OF INSTRUMENTATION
 |
| 出版日期 | 2022 |
| 卷号 | 17期号:12页码:P12006 |
| 关键词 | Solid state detectors X-ray detectors X-ray detectors and telescopes |
| DOI | 10.1088/1748-0221/17/12/P12006 |
| 文献子类 | Article |
| 英文摘要 | In recent years, scientific Complementary Metal Oxide Semiconductor (sCMOS) devices have been increasingly applied in X-ray detection, thanks to their attributes such as high frame rate, low dark current, high radiation tolerance and low readout noise. We tested the basic performance of a backside-illuminated (BSI) sCMOS sensor, which has a small pixel size of 6.5 mu m x 6.5 mu m. At a temperature of -20 degrees C, The readout noise is 1.6 e-, the dark current is 0.5 e-/pixel/s, and the energy resolution reaches 204.6 eV for single-pixel events. The effect of depletion depth on the sensor's performance was also examined, using three versions of the sensors with different deletion depths. We found that the sensor with a deeper depletion region can achieve a better energy resolution for events of all types of pixel splitting patterns, and has a higher efficiency in collecting photoelectrons produced by X-ray photons. We further study the effect of depletion depth on charge diffusion with a center-of-gravity (CG) model. Based on this work, a highly depleted sCMOS is recommended for applications of soft X-ray spectroscopy. |
| 电子版国际标准刊号 | 1748-0221 |
| 语种 | 英语 |
| WOS记录号 | WOS:000902140200003 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/299705]  |
| 专题 | 高能物理研究所_粒子天体物理中心 高能物理研究所_实验物理中心 高能物理研究所_加速器中心 高能物理研究所_东莞分部 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Hsiao, Y,Ling, Z,Zhang, C,et al. X-ray performance of a small pixel size sCMOS sensor and the effect of depletion depth[J]. JOURNAL OF INSTRUMENTATION,2022,17(12):P12006. |
| APA | Hsiao, Y.,Ling, Z.,Zhang, C.,Wang, W.,Zhou, Q.,...&Yuan, W.(2022).X-ray performance of a small pixel size sCMOS sensor and the effect of depletion depth.JOURNAL OF INSTRUMENTATION,17(12),P12006. |
| MLA | Hsiao, Y,et al."X-ray performance of a small pixel size sCMOS sensor and the effect of depletion depth".JOURNAL OF INSTRUMENTATION 17.12(2022):P12006. |
入库方式： OAI收割
来源：高能物理研究所
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