Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation
文献类型:期刊论文
作者 | Li, Siyuan4,5; Deng, Zhongxun3; Quan, Naicheng2; Zhang, Chunmin1 |
刊名 | Optics Communications |
出版日期 | 2024-02-01 |
卷号 | 552 |
ISSN号 | 00304018 |
关键词 | Ellipsometer Polarization state Snapshot |
DOI | 10.1016/j.optcom.2023.130115 |
产权排序 | 1 |
英文摘要 | Theoretical and experimental demonstrations of a static spectroscopic ellipsometer are presented. It uses a linear polarizer for generating polarization states to interact with the sample, and three non-polarization beam splitters incorporating four achromatic quarter waveplate/linear analyzer pairs for analyzing the polarization states after the interaction. Compared to previous instruments, the most significant advantage of the described model is that it can obtain the spectral ellipsometric parameters with the same spectral resolution as the spectrometer in the system by a single snapshot. © 2023 |
语种 | 英语 |
出版者 | Elsevier B.V. |
源URL | [http://ir.opt.ac.cn/handle/181661/96884] |
专题 | 西安光学精密机械研究所_光学影像学习与分析中心 |
通讯作者 | Quan, Naicheng |
作者单位 | 1.School of Science, Xi'an Jiaotong University, Xi'an, China 2.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China; 3.Shenmu Vocational and Technical College, Shenmu, China; 4.University of Chinese Academy of Sciences, Beijing, China; 5.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China; |
推荐引用方式 GB/T 7714 | Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,et al. Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation[J]. Optics Communications,2024,552. |
APA | Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,&Zhang, Chunmin.(2024).Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation.Optics Communications,552. |
MLA | Li, Siyuan,et al."Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation".Optics Communications 552(2024). |
入库方式: OAI收割
来源:西安光学精密机械研究所
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