中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation

文献类型:期刊论文

作者Li, Siyuan4,5; Deng, Zhongxun3; Quan, Naicheng2; Zhang, Chunmin1
刊名Optics Communications
出版日期2024-02-01
卷号552
ISSN号00304018
关键词Ellipsometer Polarization state Snapshot
DOI10.1016/j.optcom.2023.130115
产权排序1
英文摘要

Theoretical and experimental demonstrations of a static spectroscopic ellipsometer are presented. It uses a linear polarizer for generating polarization states to interact with the sample, and three non-polarization beam splitters incorporating four achromatic quarter waveplate/linear analyzer pairs for analyzing the polarization states after the interaction. Compared to previous instruments, the most significant advantage of the described model is that it can obtain the spectral ellipsometric parameters with the same spectral resolution as the spectrometer in the system by a single snapshot. © 2023

语种英语
出版者Elsevier B.V.
源URL[http://ir.opt.ac.cn/handle/181661/96884]  
专题西安光学精密机械研究所_光学影像学习与分析中心
通讯作者Quan, Naicheng
作者单位1.School of Science, Xi'an Jiaotong University, Xi'an, China
2.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China;
3.Shenmu Vocational and Technical College, Shenmu, China;
4.University of Chinese Academy of Sciences, Beijing, China;
5.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China;
推荐引用方式
GB/T 7714
Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,et al. Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation[J]. Optics Communications,2024,552.
APA Li, Siyuan,Deng, Zhongxun,Quan, Naicheng,&Zhang, Chunmin.(2024).Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation.Optics Communications,552.
MLA Li, Siyuan,et al."Static spectroscopic ellipsometer based on division-of-amplitude polarization demodulation".Optics Communications 552(2024).

入库方式: OAI收割

来源:西安光学精密机械研究所

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