Comparative study the tribology of amorphous carbon films via magnetron sputtering depending on the different magnetic field
文献类型:期刊论文
作者 | Jia Qian; Gao Kaixiong; Zhang Bin |
刊名 | Diamond & Related Materials |
出版日期 | 2022 |
卷号 | 121期号:8页码:108780-108788 |
关键词 | Tribology Amorphous carbon film Magnetron sputtering Magnetic field |
英文摘要 | The magnetic field configuration of magnetron sputtering has an important influence on films' properties. Here, two kinds of magnetic field configurations, Sm2Co17(outer)/Sm2Co17(inner) and Sm2Co17(outer)/Ferrite (inner), were used to deposit amorphous carbon (a-C) films. Tribo-meter, Nano-indentation, Raman spectros copy, XPS, high resolution transmission electron microscopy as well as OPERA-2D for magnetic field simulation were employed to study the influence of the magnetic field configuration on the mechanical and tribological properties of a-C films. Our results show that higher coefficients of geometrical unbalance induced a higher deposition rate and a higher hardness of a-C films. However, the friction coefficient shows an inverse trend, and the wear life is short, which can be ascribed to saturation effects via adsorption of H, O, and OH and corrosion wear, which would accelerate the wear rate. Our work will booster interesting to study the magnetic field configurations influence on a-C films properties via magnetron sputtering. |
语种 | 英语 |
源URL | [http://ir.licp.cn/handle/362003/30515] |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
通讯作者 | Jia Qian |
作者单位 | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science |
推荐引用方式 GB/T 7714 | Jia Qian,Gao Kaixiong,Zhang Bin. Comparative study the tribology of amorphous carbon films via magnetron sputtering depending on the different magnetic field[J]. Diamond & Related Materials,2022,121(8):108780-108788. |
APA | Jia Qian,Gao Kaixiong,&Zhang Bin.(2022).Comparative study the tribology of amorphous carbon films via magnetron sputtering depending on the different magnetic field.Diamond & Related Materials,121(8),108780-108788. |
MLA | Jia Qian,et al."Comparative study the tribology of amorphous carbon films via magnetron sputtering depending on the different magnetic field".Diamond & Related Materials 121.8(2022):108780-108788. |
入库方式: OAI收割
来源:兰州化学物理研究所
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