Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring
文献类型：期刊论文
| 作者 | Wang, Shaoyi2; Li, Shoujie2; Ye, Wangquan2; Song, Wenhua2; Zhang, Xuanbo2; Tian, Ye2; Guo, Jinjia2; Zhang, Xin1; Zheng, Ronger2; Lu, Yuan2 |
| 刊名 | MEASUREMENT
 |
| 出版日期 | 2023-06-15 |
| 卷号 | 214页码:8 |
| ISSN号 | 0263-2241 |
| 关键词 | Signal fluctuation suppression Confocal measurement Power monitoring Laser modulation Tomography |
| DOI | 10.1016/j.measurement.2023.112745 |
| 通讯作者 | Lu, Yuan(luyuan@ouc.edu.cn) |
| 英文摘要 | Signal fluctuation is an important issue in confocal measurements because minor intensity variation would cause a distinct deviation in the measurement result. In this work, it is proposed to use laser modulation and power monitoring to suppress the signal fluctuation in confocal measurements. The power monitoring is utilized to obtain the reference signal for correcting detection intensities, and the laser was operated at a modulated frequency to avoid unexpected vibrations from the ambient environment. The results indicated that the detection stability was well improved at least 3 times in the proposed way. Based on that, the precise measurement was successfully realized to resolve the nanometer-scaled structure of a blazed grating, and the surface topography was also achieved for a SIM card in a range of 40 & mu;m. The proposed way is practical in confocal measurements, and it is hoped to be applied in more applications. |
| WOS关键词 | LATERAL RESOLUTION ; AXIAL RESOLUTION ; MICROSCOPY ; SUPERRESOLUTION |
| 资助项目 | National Key Research and Development Program of China[2019GHZ010] ; Shandong Province Special Funding for Laoshan Laboratory ; Provincial Key Research and Development Program of Shandong, China[12174359] ; Natural Science Foundation of Shandong Province[2021QNLM0200033] ; National Natural Science Foundation of China ; [2022YFC2803800] ; [ZR2020MF123] |
| WOS研究方向 | Engineering ; Instruments & Instrumentation |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCI LTD |
| WOS记录号 | WOS:001054349800001 |
| 源URL | [http://ir.qdio.ac.cn/handle/337002/182876]  |
| 专题 | 中国科学院海洋研究所 |
| 通讯作者 | Lu, Yuan |
| 作者单位 | 1.Chinese Acad Sci, Inst Oceanol, Qingdao 266071, Peoples R China 2.Ocean Univ China, Coll Phys & Optoelect Engn, Qingdao 266100, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Shaoyi,Li, Shoujie,Ye, Wangquan,et al. Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring[J]. MEASUREMENT,2023,214:8. |
| APA | Wang, Shaoyi.,Li, Shoujie.,Ye, Wangquan.,Song, Wenhua.,Zhang, Xuanbo.,...&Lu, Yuan.(2023).Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring.MEASUREMENT,214,8. |
| MLA | Wang, Shaoyi,et al."Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring".MEASUREMENT 214(2023):8. |
入库方式： OAI收割
来源：海洋研究所
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