Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology
文献类型：期刊论文
| 作者 | Wang, Lihao; Fu, Dengyuan; Liu, Xiaochen; Zhao, Junyuan; Zhao, Jicong; Yuan, Quan; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2021 |
| 卷号 | 31期号:1页码:15009 |
| 语种 | 英语 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31447]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Wang, Lihao; Fu, Dengyuan; Liu, Xiaochen; Zhao, Junyuan; Zhao, Jicong; Yuan, Quan; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua. Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2021,31(1):15009. |
| APA | Wang, Lihao; Fu, Dengyuan; Liu, Xiaochen; Zhao, Junyuan; Zhao, Jicong; Yuan, Quan; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua.(2021).Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,31(1),15009. |
| MLA | Wang, Lihao; Fu, Dengyuan; Liu, Xiaochen; Zhao, Junyuan; Zhao, Jicong; Yuan, Quan; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua."Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 31.1(2021):15009. |
入库方式： OAI收割
来源：半导体研究所
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