Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film
文献类型：期刊论文
| 作者 | Sun, Song; Hu, Yifeng; Lai, Tianshu; Zhu, Xiaoqin |
| 刊名 | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
 |
| 出版日期 | 2021 |
| 卷号 | 32期号:5页码:6408-6413 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31498]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Sun, Song; Hu, Yifeng; Lai, Tianshu; Zhu, Xiaoqin. Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2021,32(5):6408-6413. |
| APA | Sun, Song; Hu, Yifeng; Lai, Tianshu; Zhu, Xiaoqin.(2021).Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,32(5),6408-6413. |
| MLA | Sun, Song; Hu, Yifeng; Lai, Tianshu; Zhu, Xiaoqin."Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 32.5(2021):6408-6413. |
入库方式： OAI收割
来源：半导体研究所
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