Evaluation of residual stress in InP and InAs (100) substrates obtained from single crystals grown by LEC and VGF methods
文献类型：期刊论文
| 作者 | Zhou, Yuan; Zhao, Youwen; Shen, Guiying; Xie, Hui; Liu, Jingming; Yang, Jun; Liu, Lijie |
| 刊名 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
 |
| 出版日期 | 2021 |
| 卷号 | 121页码:105460 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31519]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhou, Yuan; Zhao, Youwen; Shen, Guiying; Xie, Hui; Liu, Jingming; Yang, Jun; Liu, Lijie. Evaluation of residual stress in InP and InAs (100) substrates obtained from single crystals grown by LEC and VGF methods[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2021,121:105460. |
| APA | Zhou, Yuan; Zhao, Youwen; Shen, Guiying; Xie, Hui; Liu, Jingming; Yang, Jun; Liu, Lijie.(2021).Evaluation of residual stress in InP and InAs (100) substrates obtained from single crystals grown by LEC and VGF methods.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,121,105460. |
| MLA | Zhou, Yuan; Zhao, Youwen; Shen, Guiying; Xie, Hui; Liu, Jingming; Yang, Jun; Liu, Lijie."Evaluation of residual stress in InP and InAs (100) substrates obtained from single crystals grown by LEC and VGF methods".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 121(2021):105460. |
入库方式： OAI收割
来源：半导体研究所
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