Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers
文献类型：期刊论文
| 作者 | Jiawei Yuan1; Zhikang Li1; Qi Ma1; Jie Li1 ; Zixuan Li1; Yihe Zhao1; Shaohui Qin1; Xuan Shi1; Libo Zhao1; Ping Yang1
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| 刊名 | MICROSYSTEMS & NANOENGINEERING
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| 卷号 | 9期号:1 |
| ISSN号 | 2055-7434 |
| 英文摘要 | Ultrasonic fluid bubble detection is important in industrial controls, aerospace systems and clinical medicine because it can prevent fatal mechanical failures and threats to life. However, current ultrasonic technologies for bubble detection are based on conventional bulk PZT-based transducers, which suffer from large size, high power consumption and poor integration with ICs and thus are unable to implement real-time and long-term monitoring in tight physical spaces, such as in extracorporeal membrane oxygenation (ECMO) systems and dialysis machines or hydraulic systems in aircraft. This work highlights the prospect of capacitive micromachined ultrasonic transducers (CMUTs) in the aforementioned application situations based on the mechanism of received voltage variation caused by bubble-induced acoustic energy attenuation. The corresponding theories are established and well validated using finite element simulations. The fluid bubbles inside a pipe with a diameter as small as 8?mm are successfully measured using our fabricated CMUT chips with a resonant frequency of 1.1?MHz. The received voltage variation increases significantly with increasing bubble radii in the range of 0.5–2.5?mm. Further studies show that other factors, such as bubble positions, flow velocities, fluid medium types, pipe thicknesses and diameters, have negligible effects on fluid bubble measurement, demonstrating the feasibility and robustness of the CMUT-based ultrasonic bubble detection technique. |
| 语种 | 英语 |
| 源URL | [http://ir.yic.ac.cn/handle/133337/34552]  |
| 专题 | 中国科学院烟台海岸带研究所 |
| 作者单位 | 1.西安交通大学 2.中国科学院烟台海岸带研究所 3.Shaanxi University of Science and Technology, Xi’an 4.旧金山州立大学 |
| 推荐引用方式 GB/T 7714 | Jiawei Yuan,Zhikang Li,Qi Ma,et al. Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers[J]. MICROSYSTEMS & NANOENGINEERING,9(1). |
| APA | Jiawei Yuan.,Zhikang Li.,Qi Ma.,Jie Li.,Zixuan Li.,...&Zhuangde Jiang. |
| MLA | Jiawei Yuan,et al."Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers".MICROSYSTEMS & NANOENGINEERING 9.1 |
入库方式： OAI收割
来源：烟台海岸带研究所
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