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Emerging MEMS sensors for ocean physics: Principles, materials, and applications

文献类型：期刊论文

;
作者Yang, Yang1; Dai, Zhuhang1; Chen, Yi2; Yuan, Yapeng1; Yalikun, Yaxiaer3; Shang, Chenjing1,2
刊名APPLIED PHYSICS REVIEWS ; APPLIED PHYSICS REVIEWS
出版日期2024-06-01 ; 2024-06-01
卷号11期号:2页码:25
ISSN号1931-9401 ; 1931-9401
DOI10.1063/5.0194194 ; 10.1063/5.0194194
英文摘要The use of ocean sensors is crucial for exploration of the ocean and harnessing the potential of its resources. However, conventional ocean sensors are limited by their fabrication techniques, which result in sensors that are large in size, have high-power consumption requirements, and involve complex deployment processes. However, fulfilling observation requirements in the harsh marine environment presents a formidable challenge for these devices. Microelectromechanical system (MEMS) technologies offer a promising solution that will enable development of a new generation of ocean sensors that offer superior performance. This paper focuses on MEMS-based ocean sensors that have been designed to measure both essential physical parameters and fundamental processes within the marine environment, including the ocean's conductivity, temperature, and depth, ocean currents, ocean turbulence, earthquakes, seafloor deformation, and ocean acoustic signals. The fundamental designs of these sensors, including their working principles, structures, properties, and fabrication procedures, are illustrated in the individual sections. The paper also discusses the important challenges that MEMS ocean sensors may encounter, along with their prospects for future development. By highlighting the potential of MEMS-based ocean sensors, this review aims to contribute to the development of more efficient and reliable ocean observation systems. (c) 2024 Author(s).; The use of ocean sensors is crucial for exploration of the ocean and harnessing the potential of its resources. However, conventional ocean sensors are limited by their fabrication techniques, which result in sensors that are large in size, have high-power consumption requirements, and involve complex deployment processes. However, fulfilling observation requirements in the harsh marine environment presents a formidable challenge for these devices. Microelectromechanical system (MEMS) technologies offer a promising solution that will enable development of a new generation of ocean sensors that offer superior performance. This paper focuses on MEMS-based ocean sensors that have been designed to measure both essential physical parameters and fundamental processes within the marine environment, including the ocean's conductivity, temperature, and depth, ocean currents, ocean turbulence, earthquakes, seafloor deformation, and ocean acoustic signals. The fundamental designs of these sensors, including their working principles, structures, properties, and fabrication procedures, are illustrated in the individual sections. The paper also discusses the important challenges that MEMS ocean sensors may encounter, along with their prospects for future development. By highlighting the potential of MEMS-based ocean sensors, this review aims to contribute to the development of more efficient and reliable ocean observation systems. (c) 2024 Author(s).
WOS关键词SEA-FLOOR DEFORMATION ; SEA-FLOOR DEFORMATION ; SHEAR-STRESS SENSOR ; HIGH-SENSITIVITY ; VECTOR HYDROPHONE ; PRESSURE SENSOR ; PACIFIC-OCEAN ; DEEP-OCEAN ; DESIGN ; MARINE ; TEMPERATURE ; SHEAR-STRESS SENSOR ; HIGH-SENSITIVITY ; VECTOR HYDROPHONE ; PRESSURE SENSOR ; PACIFIC-OCEAN ; DEEP-OCEAN ; DESIGN ; MARINE ; TEMPERATURE
资助项目National Natural Science Foundation of China10.13039/501100001809[42222606] ; National Natural Science Foundation of China10.13039/501100001809[42222606] ; National Natural Science Foundation of China10.13039/501100001809[62103400] ; National Natural Science Foundation of China10.13039/501100001809[42376219] ; National Natural Science Foundation of China10.13039/501100001809[42211540003] ; National Natural Science Foundation of China[CXBS202103] ; Independent Project Deployed by Innovative Academy of Marine Information Technology of CAS[2022KJCX66] ; Sanya Science and Technology Special Fund[OOST2021-07] ; CAS Key Laboratory of Science and Technology on Operational Oceanography ; National Natural Science Foundation of China10.13039/501100001809[62103400] ; National Natural Science Foundation of China10.13039/501100001809[42376219] ; National Natural Science Foundation of China10.13039/501100001809[42211540003] ; National Natural Science Foundation of China[CXBS202103] ; Independent Project Deployed by Innovative Academy of Marine Information Technology of CAS[2022KJCX66] ; Sanya Science and Technology Special Fund[OOST2021-07] ; CAS Key Laboratory of Science and Technology on Operational Oceanography
WOS研究方向Physics ; Physics
语种英语 ; 英语
WOS记录号WOS:001229872800001 ; WOS:001229872800001
出版者AIP Publishing ; AIP Publishing
资助机构National Natural Science Foundation of China10.13039/501100001809 ; National Natural Science Foundation of China10.13039/501100001809 ; National Natural Science Foundation of China ; Independent Project Deployed by Innovative Academy of Marine Information Technology of CAS ; Sanya Science and Technology Special Fund ; CAS Key Laboratory of Science and Technology on Operational Oceanography ; National Natural Science Foundation of China ; Independent Project Deployed by Innovative Academy of Marine Information Technology of CAS ; Sanya Science and Technology Special Fund ; CAS Key Laboratory of Science and Technology on Operational Oceanography
源URL[http://ir.idsse.ac.cn/handle/183446/11042]  
专题深海工程技术部_深海资源开发研究室
通讯作者Shang, Chenjing
作者单位1.Chinese Acad Sci, Inst Deep Sea Sci & Engn, Sanya 572000, Peoples R China
2.Shenzhen Univ, Coll Life Sci & Oceanog, Shenzhen Key Lab Marine Bioresource & Ecoenvironm, Shenzhen 518060, Peoples R China
3.Nara Inst Sci & Technol, Div Mat Sci, 916-5 Takayama Cho, Ikoma, Nara 6300192, Japan
推荐引用方式
GB/T 7714		 Yang, Yang,Dai, Zhuhang,Chen, Yi,et al. Emerging MEMS sensors for ocean physics: Principles, materials, and applications, Emerging MEMS sensors for ocean physics: Principles, materials, and applications[J]. APPLIED PHYSICS REVIEWS, APPLIED PHYSICS REVIEWS,2024, 2024,11, 11(2):25, 25.
APA Yang, Yang,Dai, Zhuhang,Chen, Yi,Yuan, Yapeng,Yalikun, Yaxiaer,&Shang, Chenjing.(2024).Emerging MEMS sensors for ocean physics: Principles, materials, and applications.APPLIED PHYSICS REVIEWS,11(2),25.
MLA Yang, Yang,et al."Emerging MEMS sensors for ocean physics: Principles, materials, and applications".APPLIED PHYSICS REVIEWS 11.2(2024):25.

入库方式： OAI收割

来源：深海科学与工程研究所

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