Method to construct the initial structure of optical systems based on full-field aberration correction
文献类型：期刊论文
| 作者 | X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang |
| 刊名 | Applied Optics
 |
| 出版日期 | 2023 |
| 卷号 | 62期号:17页码:4571-4582 |
| ISSN号 | 1559128X |
| DOI | 10.1364/AO.488647 |
| 英文摘要 | To meet full-field image quality requirements for extremely lowaberration optical systems, an initial structure construction method for reflective optical systems based on full-field aberration correction is proposed. The aberration of the full field is used as the main evaluation criterion in this method. A multi-field evaluation function is established using the aberration values of multiple characteristic field points to represent the full-field imaging quality, and spatial ray tracing is introduced to constrain the optical system structure.Multi-objective optimization of the evaluation function is performed using a combinatorial nondominated sorting and metaheuristics algorithm; an initial optical system with a reasonable structure and corrected third-order aberrations over the full field is subsequently obtained. After optimization, an extreme ultraviolet lithography objective with a numerical aperture of 0.33 and root-mean-square wavefront error of 0.128 nm (1=105λ; λD13.5 nm) is obtained. © 2023 Optica Publishing Group. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/67384]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang. Method to construct the initial structure of optical systems based on full-field aberration correction[J]. Applied Optics,2023,62(17):4571-4582. |
| APA | X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang.(2023).Method to construct the initial structure of optical systems based on full-field aberration correction.Applied Optics,62(17),4571-4582. |
| MLA | X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang."Method to construct the initial structure of optical systems based on full-field aberration correction".Applied Optics 62.17(2023):4571-4582. |
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