Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space
文献类型：期刊论文
| 作者 | M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel |
| 刊名 | ACS Nano
 |
| 出版日期 | 2023 |
| 卷号 | 17期号:18页码:17761-17770 |
| ISSN号 | 19360851 |
| DOI | 10.1021/acsnano.3c02699 |
| 英文摘要 | On-chip waveguide sensors are potential candidates for deep-space exploration because of their high integration and low power consumption. Since the fundamental absorption of most gas molecules exists in the mid-infrared (e.g., 3-12 μm), it is of great significance to fabricate wideband mid-infrared sensors with high external confinement factor (ECF). To overcome the limited transparency window and strong waveguide dispersion, a chalcogenide suspended nanorib waveguide sensor was proposed for ultra-wideband mid-infrared gas sensing, and three waveguide sensors (WG1-WG3) with optimized dimensions exhibit a wide waveband of 3.2-5.6 μm, 5.4-8.2 μm, and 8.1-11.5 μm with exceptionally high ECFs of 107-116%, 107-116%, and 116-128%, respectively. The waveguide sensors were fabricated by a two-step lift-off method without dry etching to reduce the process complexity. Experimental ECFs of 112%, 110%, and 110% were obtained at 3.291 μm, 4.319 μm, and 7.625 μm, respectively, through methane (CH4) and carbon dioxide (CO2) measurements. A limit of detection of 5.9 ppm was achieved for an averaging time of 64.2 s through the Allan deviation analysis of CH4 at 3.291 μm, leading to a comparable noise equivalent absorption sensitivity of 2.3 × 10-5 cm-1 Hz-1/2 as compared to the hollow-core fiber and on-chip gas sensors. © 2023 American Chemical Society. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/67792]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel. Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space[J]. ACS Nano,2023,17(18):17761-17770. |
| APA | M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel.(2023).Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space.ACS Nano,17(18),17761-17770. |
| MLA | M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel."Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space".ACS Nano 17.18(2023):17761-17770. |
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