中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Laser-guided anisotropic etching for precision machining of micro-engineered glass components

文献类型:期刊论文

作者Li, Jun3; Zhong, Shuai3; Huang, Jiaxu3; Qiu, Pei3; Wang, Pu2,3; Li, Hui3; Qin, Chu1; Miao, Duo3; Xu, Shaolin3
刊名International Journal of Machine Tools and Manufacture
出版日期2024-05
卷号198
关键词Ultrafast laser Laser modification Wet etching Glass microstructures Large-scale fabrication
ISSN号08906955
DOI10.1016/j.ijmachtools.2024.104152
产权排序2
英文摘要

Micro-engineered glass components play a vital role in various domains, but their full potential remains untapped due to the lack of easily accessible high-precision machining methods for customizable microstructure. Our discovery of a new phenomenon, where laser-modified regions break the rule of inherently isotropic glass etching and regulate a directional anisotropic etching along modified tracks, has led to the development of a laser-guided anisotropic etching (LGAE) method. This method enables crafting precision glass microstructures with sharp features, smooth surfaces, and adjustable shapes and sizes. An ultrafast Bessel beam is utilized to create high aspect-ratio line-shaped modification within the glass. With a higher etching rate than pristine glass, the modified line guides directional anisotropic etching along the modified track, facilitating the formation of a V-shape with an angle altered by the etching ratio. These modified lines can further serve as basic building blocks to interconnect to construct a 3D internal modification region and then guide the glass's overall surface morphology etching evolution, enabling the creation of microstructures featuring designable shapes and adjustable feature sizes. To accurately predict and control the shape of the microstructures, we establish a finite difference etching model that incorporates localized etching rate regulation, validating the robustness and controllability of LGAE. This scalable method has successfully fabricated a 50 μm period micro-pyramid array with high uniformity over a centimeter-scale area, demonstrating its suitability for large-scale manufacturing. The showcased micro-engineered glass components encompass V-groove arrays for fiber alignment, blazed gratings for light modulation, and microchannels with customized trajectories for microfluidic chips. These advancements driven by LGAE can significantly contribute to the progress of glass-based research and industries. © 2024 Elsevier Ltd

语种英语
出版者Elsevier Ltd
源URL[http://ir.opt.ac.cn/handle/181661/97405]  
专题西安光学精密机械研究所_先进光学仪器研究室
通讯作者Xu, Shaolin
作者单位1.School of Microelectronics, Southern University of Science and Technology, Shenzhen; 518055, China
2.The Advanced Optical Instrument Research Department, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China;
3.Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen; 518055, China;
推荐引用方式
GB/T 7714
Li, Jun,Zhong, Shuai,Huang, Jiaxu,et al. Laser-guided anisotropic etching for precision machining of micro-engineered glass components[J]. International Journal of Machine Tools and Manufacture,2024,198.
APA Li, Jun.,Zhong, Shuai.,Huang, Jiaxu.,Qiu, Pei.,Wang, Pu.,...&Xu, Shaolin.(2024).Laser-guided anisotropic etching for precision machining of micro-engineered glass components.International Journal of Machine Tools and Manufacture,198.
MLA Li, Jun,et al."Laser-guided anisotropic etching for precision machining of micro-engineered glass components".International Journal of Machine Tools and Manufacture 198(2024).

入库方式: OAI收割

来源:西安光学精密机械研究所

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