Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm
文献类型：期刊论文
| 作者 | Z. Wang, T. Wang, Y. Yang, X. Mi and J. Wang |
| 刊名 | Micromachines
 |
| 出版日期 | 2023 |
| 卷号 | 14期号:6 |
| ISSN号 | 2072666X |
| DOI | 10.3390/mi14061163 |
| 英文摘要 | Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting can introduce significant errors. This study introduces a compensation strategy based on Pearson’s correlation coefficient to effectively reduce measurement errors. Additionally, a fast-matching algorithm based on peak clustering was proposed to meet real-time requirements for non-contact probes. To validate the effectiveness of the compensation strategy and matching algorithm, detailed simulations and physical experiments were conducted. The results showed that for a numerical aperture of 0.4 and a depth of slope © 2023 by the authors. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/68003]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Z. Wang, T. Wang, Y. Yang, X. Mi and J. Wang. Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm[J]. Micromachines,2023,14(6). |
| APA | Z. Wang, T. Wang, Y. Yang, X. Mi and J. Wang.(2023).Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm.Micromachines,14(6). |
| MLA | Z. Wang, T. Wang, Y. Yang, X. Mi and J. Wang."Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm".Micromachines 14.6(2023). |
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