Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions
文献类型：期刊论文
| 作者 | Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang |
| 刊名 | ACS Applied Materials and Interfaces
 |
| 出版日期 | 2023 |
| 卷号 | 15期号:25页码:30793-30803 |
| ISSN号 | 19448244 |
| DOI | 10.1021/acsami.3c04953 |
| 英文摘要 | High-performance flexible sensors are essential for real-time information analysis and constructing noncontact communication modules for emerging human-machine interactions. In these applications, batch fabrication of sensors that exhibit high performance at the wafer level is in high demand. Here, we present organic nanoforest-based humidity sensor (NFHS) arrays on a 6 in. flexible substrate prepared via a facile, cost-effective manufacturing approach. Such an NFHS achieves state-of-the-art overall performance: high sensitivity and fast recovery time; the best properties are at a small device footprint. The high sensitivity (8.84 pF/% RH) and fast response time (5 s) of the as-fabricated organic nanoforests are attributed to the abundant hydrophilic groups, the ultra-large surface area with a huge number of nanopores, and the vertically distributed structures beneficial to the transfer of molecules up and down. The NFHS also exhibits excellent long-term stability (90 days), superior mechanical flexibility, and good performance repeatability after bending. With these superiorities, the NFHS is further applied as a smart noncontact switch, and the NFHS array is used as the motion trajectory tracker. The wafer-level batch fabrication capability of our NFHS provides a potential strategy for developing practical applications of such humidity sensors. © 2023 American Chemical Society |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/68246]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang. Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions[J]. ACS Applied Materials and Interfaces,2023,15(25):30793-30803. |
| APA | Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang.(2023).Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions.ACS Applied Materials and Interfaces,15(25),30793-30803. |
| MLA | Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang."Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions".ACS Applied Materials and Interfaces 15.25(2023):30793-30803. |
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