One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering
文献类型：期刊论文
| 作者 | X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu |
| 刊名 | Materials Today Physics
 |
| 出版日期 | 2023 |
| 卷号 | 35 |
| ISSN号 | 25425293 |
| DOI | 10.1016/j.mtphys.2023.101102 |
| 英文摘要 | Chip-scale lithium niobate (LN) yields a competitive candidate for terahertz (THz) on-chip communications, which could enable high-rate data transmission, non-invasive biosensing, and cloud-based technologies. However, it remains a key challenge to reach such goals to fabricate functional millimeter-scale crack-free THz microstructures on chip-scale LN, especially for industrial use. Here, we propose a one-step crack-free microstructure fabrication approach using dispersion-engineered femtosecond laser pulses without involving any postprocessing method. By laser dispersion engineering, the fabricated one-dimensional photonic crystal can improve the THz transmittance by about 5.8 times compared to the general case. This achievement is based on a thorough investigation into the influence of femtosecond laser temporal dispersion on the lithium niobite machining process. Our findings may further promote the development and industrial applications of LN-based photonics and optoelectronics, especially for chip-scale THz devices, as well as offer insights into the realization of precision machining of other forms of hard and brittle materials. © 2023 Elsevier Ltd |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/68271]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu. One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering[J]. Materials Today Physics,2023,35. |
| APA | X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu.(2023).One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering.Materials Today Physics,35. |
| MLA | X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu."One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering".Materials Today Physics 35(2023). |
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