Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism
文献类型:期刊论文
作者 | Jiang, Bo4; Dong, Yiming3,4; Zhang, Zijie2,4; Li, Xiangyu4; Wei, Yuxuan4; Guo, Yifan2,4; Liu, Haixia1 |
刊名 | APPLIED SCIENCES-BASEL
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出版日期 | 2024-05 |
卷号 | 14期号:9 |
关键词 | nano-positioning mechanisms synchrotron radiation facility multi-objective optimization |
ISSN号 | 2076-3417 |
DOI | 10.3390/app14093756 |
产权排序 | 1 |
英文摘要 | In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study. |
语种 | 英语 |
WOS记录号 | WOS:001219818800001 |
出版者 | MDPI |
源URL | [http://ir.opt.ac.cn/handle/181661/97470] ![]() |
专题 | 西安光学精密机械研究所_光电测量技术实验室 |
通讯作者 | Liu, Haixia |
作者单位 | 1.Xian Univ Architecture & Technol, Sch Mech & Elect Engn, Xian 710055, Peoples R China 2.Xian Technol Univ, Sch Optoelect Engn, Xian 710021, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 4.Xian Univ Architecture & Technol, Sch Mech & Elect Engn, Xian 710055, Peoples R China |
推荐引用方式 GB/T 7714 | Jiang, Bo,Dong, Yiming,Zhang, Zijie,et al. Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism[J]. APPLIED SCIENCES-BASEL,2024,14(9). |
APA | Jiang, Bo.,Dong, Yiming.,Zhang, Zijie.,Li, Xiangyu.,Wei, Yuxuan.,...&Liu, Haixia.(2024).Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism.APPLIED SCIENCES-BASEL,14(9). |
MLA | Jiang, Bo,et al."Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism".APPLIED SCIENCES-BASEL 14.9(2024). |
入库方式: OAI收割
来源:西安光学精密机械研究所
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