Dynamic multi-focus laser sculpting of freeform 3D glass microstructures
文献类型：期刊论文
| 作者 | Yao, Li3; Xu, Kang3; Huang, Lingyu3; Huang, Peilin3; Li, Zongyao3; Wang, Pu1,2,3; Xu, Shaolin3 |
| 刊名 | Optics and Lasers in Engineering
 |
| 出版日期 | 2024-09 |
| 卷号 | 180 |
| 关键词 | Dynamic multi-focus laser Three-dimensional glass microstructures Glass processing |
| ISSN号 | 01438166 |
| DOI | 10.1016/j.optlaseng.2024.108278 |
| 产权排序 | 2 |
| 英文摘要 | The three-dimensional (3D) sculpturing of glass remains a significant challenge owing to its inherent hard and brittle nature. We develop a novel dynamic multi-focus laser sculpting (DMLS) method tailored for 3D glass fabrication. This method employs two-dimensional (2D) spatial multi-focus beams to form sectional profiles of 3D structures, which are modulated by superimposing the phase of Fresnel lenses and blazed gratings. With dynamic switching of phase diagrams on a spatial light modulator, the multi-focus beam rotates and creates a customized 3D laser-modified region inside the bulk glass. Following chemical etching helps remove the modified zones, forming ultimate 3D morphology on glass surface. The feasibility of this method hinges upon achieving uniform foci energy and narrow spatial foci intervals, essential for the precise removal of modified regions through connected crack channels during etching. We propose an extracting strategy to separate foci with random sequences into several groups to disrupt the periodicity of foci, thereby effectively weakening the unexpected Moiré fringes on the phase diagrams. This strategy enables the forming of dense foci by a single diagram with high uniformity, shortening the interval between foci. Further, for the lower surface roughness and higher precision of 3D structures, optimization of fabrication parameters is applied by experimental and numerical analysis. With the above optimization, the DMLS method is capable of carving diversified 3D glass structures, including hemispheres, cones, pyramids, semi-ellipsoids, and petal-like structures. Our method exhibits considerable versatility in processible structures with shape deviation lower than 1.9 μm, showing substantial potential in glass processing. © 2024 Elsevier Ltd |
| 语种 | 英语 |
| 出版者 | Elsevier Ltd |
| 源URL | [http://ir.opt.ac.cn/handle/181661/97486]  |
| 专题 | 西安光学精密机械研究所_先进光学仪器研究室 |
| 作者单位 | 1.Xi'an Key Laboratory of High Power Laser Measurement Technology and Instrument, Xi'an; 710119, China 2.The Advanced Optical Instrument Research Department, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China; 3.Department of Mechanical and Energy Engineering, Southern University of Science and Technology, 1088 Xueyuan Avenue, Shenzhen; 518055, China; |
| 推荐引用方式 GB/T 7714 | Yao, Li,Xu, Kang,Huang, Lingyu,et al. Dynamic multi-focus laser sculpting of freeform 3D glass microstructures[J]. Optics and Lasers in Engineering,2024,180. |
| APA | Yao, Li.,Xu, Kang.,Huang, Lingyu.,Huang, Peilin.,Li, Zongyao.,...&Xu, Shaolin.(2024).Dynamic multi-focus laser sculpting of freeform 3D glass microstructures.Optics and Lasers in Engineering,180. |
| MLA | Yao, Li,et al."Dynamic multi-focus laser sculpting of freeform 3D glass microstructures".Optics and Lasers in Engineering 180(2024). |
入库方式： OAI收割
来源：西安光学精密机械研究所
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