A Fully Automatic High-Resolution EUV Monochromator for EUV metrology applications
文献类型：会议论文
| 作者 | Cui JF(崔峻烽)2,3,4 ; Meng RY(孟润宇)2,3,4; Zhao, Bianli1,4; Yang, Hao4; Chen, Jianhui4; Zhang, Xiaoshi2,4
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| 出版日期 | 2024 |
| 会议日期 | 2024-08-04 |
| 会议地点 | Incheon, Korea, Republic of |
| DOI | 10.1109/CLEO-PR60912.2024.10676889 |
| 英文摘要 | We develop a fully automatic EUV monochromator, and demonstrate real-time wavelength tuning and in-situ and in-line spectrum measurement. This is an ideal tool for EUV metrology applications. © 2024 IEEE. |
| 产权排序 | 第2完成单位 |
| 资助机构 | N/A |
| 会议录 | 16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024
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| 文献子类 | Conference article (CA) |
| 学科主题 | 天文学 |
| 语种 | 英语 |
| URL标识 | 查看原文 |
| 资助项目 | N/A |
| ISBN号 | 9798350372076 |
| 源URL | [http://ir.ynao.ac.cn/handle/114a53/27650]  |
| 专题 | 云南天文台_丽江天文观测站（南方基地） |
| 作者单位 | 1.Southwest United Graduate School, Yunnan, Kunming, 650092, China 2.University of Chinese Academy of Sciences, Beijing, 100049, China; 3.Yunnan Astronomical Observatory, Chinese Academy of Sciences, Yunnan, Kunming, 650011, China; 4.School of Physics and Astronomy, Yunnan University, Yunnan, Kunming, 650091, China; |
| 推荐引用方式 GB/T 7714 | Cui JF,Meng RY,Zhao, Bianli,et al. A Fully Automatic High-Resolution EUV Monochromator for EUV metrology applications[C]. 见:. Incheon, Korea, Republic of. 2024-08-04. |
入库方式： OAI收割
来源：云南天文台
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