Fabrication of ultra-thin glass sheet by weight-controlled load-assisted precise thermal stretching
文献类型:期刊论文
作者 | Yuan, Yapeng1,2![]() |
刊名 | Sensors and Actuators A: Physical
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出版日期 | 2021-02 |
卷号 | 321页码:112604 |
通讯作者 | Yalikun, Yaxiaer ; Tanaka, Yo |
目次 | 否 |
英文摘要 | Glass is a common material used in various microsystems including sensors, actuators, and microfluidic devices due to its extraordinary properties. However, lack of flexibility and elasticity limits its potential for further applications. To solve this issue, thinning the thick glass plate to a few microns is a solution. However, conventional methods for thinning thick glass plates are complex, risky, time-consuming, and difficult for implementation at the laboratory level. This paper reports an efficient and convenient fabrication method for an independent ultra-thin glass sheet (UTGS) (≤ 3 μm, the world’s thinnest) by utilizing a weight-controlled load-assisted (WCL-assisted) thermal stretching. Unlike other methods requiring a full melting of the glass material, the key point of the proposed method is using a WCL to precisely stretch a commercial thick glass plate to achieve the desired glass sheet thickness. To fabricate UTGSs of the desired thicknesses, experimental conditions including temperatures (630℃ - 700℃), cooling times (1.5 h - 2.5 h), and weights of loads (1 g - 9 g) were investigated. Furthermore, the potential advantage of using the fabricated UTGS for indicator applications in micro-systems was proven by fabricating a pressure indicator having higher sensitivity than presently available devices. For the same working conditions, the maximum sensitivity of the new indicator was improved by 86.8 % compared with the sensitivity previously obtained. |
语种 | 英语 |
版本 | 出版稿 |
源URL | [http://ir.idsse.ac.cn/handle/183446/11670] ![]() |
专题 | 深海工程技术部_深海资源开发研究室 |
通讯作者 | Yalikun, Yaxiaer; Tanaka, Yo |
作者单位 | 1.Graduate School of Frontier Biosciences, Osaka University 2.Graduate School of Frontier Biosciences, Osaka University 3.Graduate School of Nara Institute of Science and Technology |
推荐引用方式 GB/T 7714 | Yuan, Yapeng,Yalikun, Yaxiaer,Amaya, Satoshi,et al. Fabrication of ultra-thin glass sheet by weight-controlled load-assisted precise thermal stretching[J]. Sensors and Actuators A: Physical,2021,321:112604. |
APA | Yuan, Yapeng,Yalikun, Yaxiaer,Amaya, Satoshi,Aishan, Yusufu,Shen, Yigang,&Tanaka, Yo.(2021).Fabrication of ultra-thin glass sheet by weight-controlled load-assisted precise thermal stretching.Sensors and Actuators A: Physical,321,112604. |
MLA | Yuan, Yapeng,et al."Fabrication of ultra-thin glass sheet by weight-controlled load-assisted precise thermal stretching".Sensors and Actuators A: Physical 321(2021):112604. |
入库方式: OAI收割
来源:深海科学与工程研究所
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