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Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer

文献类型：期刊论文

作者Luo, Yang5; Han, Mingyue4,5; Li, Duoduo5; Tang, Ling5; Li, Hua5; Li, Liuhe5; Wang, Weizong4; Deng, Dachen5; Gu, Jiabin3; Li GD(李国栋)1,2
刊名PLASMA SOURCES SCIENCE & TECHNOLOGY
出版日期2024-10-01
卷号33期号:10页码:17
关键词BP-HiPIMS double layer ion kinetic energy plasma potential global current balance model
ISSN号0963-0252
DOI10.1088/1361-6595/ad52bf
通讯作者Han, Mingyue(hanmingyue@buaa.edu.cn) ; Li, Liuhe(liliuhe@buaa.edu.cn)
英文摘要As an emerging ion acceleration plasma source, the bipolar-pulse high power impulse magnetron sputtering (BP-HiPIMS) discharge has been widely studied by academia and industry due to its ability to adjust the ion kinetic energy. Formation of the double layer (DL) potential structure during the BP-HiPIMS positive pulse is vital for accelerating ions, but its structural characteristics are still unclear. In this work, to understand the DL characteristics affected by various discharge parameters, the evolution of plasma potential V-p and ion energy in BP-HiPIMS discharge with copper target has been investigated systematically using an emissive probe and mass spectrometer together. Spatial plasma potential measurements show that the DL is established in front of the target during the positive pulse, whose boundary potential drop U-DL to accelerate ions can be increased to similar to 60 V at a lower operating gas pressure (p= 0.6 Pa) and a higher applied positive pulse voltage (U+ = 200 V). The ignition onset time of DL after applying the positive pulse can be shortened to similar to 25 mu s by decreasing the gas pressure and increasing the positive pulse voltage or negative pulse duration. After DL ignition, a group of high-energy copper ions with energy higher than the surrounding plasma potential can be recognized in the ion energy distribution function curves in the downstream plasma. This result illustrates that the copper ions can be ionized in the high-potential plasma region and be accelerated by the DL boundary potential drop. In addition, a global current balance model of the DL in BP-HiPIMS is developed, which suggests that the U-DL can be well adjusted by increasing the positive pulse voltage U+ especially for U+ > 200 V as verified by the experimental potential measurements. All results suggest that the copper particles play an important role in the formation of DL and the DL plays an important role in accelerating copper ions.
分类号一类
WOS关键词MAGNETRON ; ELECTRON ; MODEL
资助项目National Science and Technology Major Projecthttp://dx.doi.org/10.13039/501100018537[2023M730180] ; China Postdoctoral Science Foundation[NSFC 12305278] ; China Postdoctoral Science Foundation[NSFC 12275014] ; National Natural Science Foundation of China[YWF-23-Q-1019] ; Fundamental Research Funds for the Central Universities[GZB20230929] ; Postdoctoral Fellowship Program of CPSF[Y2022-IV-0001-0018] ; National Science and Technology Major Project
WOS研究方向Physics
语种英语
WOS记录号WOS:001335813200001
资助机构National Science and Technology Major Projecthttp://dx.doi.org/10.13039/501100018537 ; China Postdoctoral Science Foundation ; National Natural Science Foundation of China ; Fundamental Research Funds for the Central Universities ; Postdoctoral Fellowship Program of CPSF ; National Science and Technology Major Project
其他责任者Han, Mingyue ; Li, Liuhe
源URL[http://dspace.imech.ac.cn/handle/311007/97079]  
专题宽域飞行工程科学与应用中心
作者单位1.Chinese Acad Sci, Inst Mech, Beijing, Peoples R China
2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing, Peoples R China;
3.Beijing Jiaotong Univ, Sch Mech Elect & Control Engn, Beijing 100044, Peoples R China;
4.Beihang Univ, Sch Astronaut, Beijing 100191, Peoples R China;
5.Beihang Univ, Sch Mech Engn & Automat, Dept Mat Proc & Control Engn, Beijing 100191, Peoples R China;
推荐引用方式
GB/T 7714		 Luo, Yang,Han, Mingyue,Li, Duoduo,et al. Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY,2024,33(10):17.
APA Luo, Yang.,Han, Mingyue.,Li, Duoduo.,Tang, Ling.,Li, Hua.,...&李国栋.(2024).Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer.PLASMA SOURCES SCIENCE & TECHNOLOGY,33(10),17.
MLA Luo, Yang,et al."Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer".PLASMA SOURCES SCIENCE & TECHNOLOGY 33.10(2024):17.

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来源：力学研究所

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