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A rigid and compact piezoelectric motor with high output efficiency

文献类型：期刊论文

作者Touqeer, Muhammad1,2; Maqbool, Syed Asad1,2; Esmaeilzadeh, Behnam1,2; Zheng, Shaofeng1,2; Meng, Wenjie2,3; Abas, Asim1,2; Wang, Jihao2,3; Feng, Qiyuan2,3; Hou, Yubin2,3; Lu, Qingyou1,2,3,4
刊名REVIEW OF SCIENTIFIC INSTRUMENTS
出版日期2024-08-01
卷号95
ISSN号0034-6748
DOI10.1063/5.0217705
通讯作者Lu, Qingyou(qxl@ustc.edu.cn)
英文摘要We introduce a novel piezoelectric stepper motor featuring high compactness, rigidity, and any direction operability. Here, not only is the structure of high novelty but also the working principle very simple. The piezo stacks unit is sandwiched between two spring finger pieces, with almost equal clamping forces applied between the top of the piezo stacks' unit and the spring finger piece. Applying individual driving signals to each of the five piezo stack pairs, causing deformation one by one in the same direction, followed by simultaneous recovery in the reverse direction, enables movement of the frame part. The optimized clamping force of the piezoelectric stack units and spring fingers ensures maximum output force. The motor's operational capability at low threshold voltages, specifically 8 V for downward movement and 10 V for upward movement, confirmed its efficacy in both vertical and horizontal directions. The motor's operational capability at a low threshold voltage of 10 V confirmed its efficacy in both vertical and horizontal directions. At room temperature, step size ranges from 0.3 to 7.4 mu m at 20 Hz frequency and varying driving voltage from 10 to 180 V. It has a maximum travel range of about 5 mm and can lift a maximum load of 220 g in an upward direction, so the maximum output force generated by this motor is 2.2 N. The compact and rigid design is capable of building an atomically resolved scanning probe microscope, and its working ability has the potential to use the cleavage of different types of samples in limited space environments, such as the small-bore superconducting magnet and low temperature.
WOS关键词PIEZO MOTOR ; ACTUATOR
资助项目National Key Research and Development Program of Chinahttps://doi.org/10.13039/501100012166[2023YFA1607701] ; National Key R&D Program of China[51627901] ; National Key R&D Program of China[U1932216] ; National Key R&D Program of China[12004386] ; National Natural Science Foundation of China[DSS-WXGZ-2019-0011] ; National Natural Science Foundation of China[DSSWXGZ-2021-0006] ; Maintenance and Renovation Project for CAS Major Scientific and Technological Infrastructure[YJKYYQ20190014] ; Chinese Academy of Sciences Scientific Research Equipment[2021HSC-UE010] ; Hefei Science Center CAS
WOS研究方向Instruments & Instrumentation ; Physics
语种英语
WOS记录号WOS:001296903900005
出版者AIP Publishing
资助机构National Key Research and Development Program of Chinahttps://doi.org/10.13039/501100012166 ; National Key R&D Program of China ; National Natural Science Foundation of China ; Maintenance and Renovation Project for CAS Major Scientific and Technological Infrastructure ; Chinese Academy of Sciences Scientific Research Equipment ; Hefei Science Center CAS
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/134856]  
专题中国科学院合肥物质科学研究院
通讯作者Lu, Qingyou
作者单位1.Univ Sci & Technol China, Hefei 230026, Peoples R China
2.Chinese Acad Sci, Hefei Inst Phys Sci, High Magnet Field Lab, Hefei 230031, Anhui, Peoples R China
3.Chinese Acad Sci, Hefei Inst Phys Sci, Anhui Key Lab Low Energy Quantum Mat & Devices, High Magnet Field Lab, Hefei 230031, Anhui, Peoples R China
4.Univ Sci & Technol China, Anhui Lab Adv Photon Sci & Technol, Hefei 230026, Anhui, Peoples R China
推荐引用方式
GB/T 7714		 Touqeer, Muhammad,Maqbool, Syed Asad,Esmaeilzadeh, Behnam,et al. A rigid and compact piezoelectric motor with high output efficiency[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2024,95.
APA Touqeer, Muhammad.,Maqbool, Syed Asad.,Esmaeilzadeh, Behnam.,Zheng, Shaofeng.,Meng, Wenjie.,...&Lu, Qingyou.(2024).A rigid and compact piezoelectric motor with high output efficiency.REVIEW OF SCIENTIFIC INSTRUMENTS,95.
MLA Touqeer, Muhammad,et al."A rigid and compact piezoelectric motor with high output efficiency".REVIEW OF SCIENTIFIC INSTRUMENTS 95(2024).

入库方式： OAI收割

来源：合肥物质科学研究院

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