Precise Patterning of Flexible Transparent and Conductive Films without Chemical Etchings and Applications in Capacitive Proximity Sensors
文献类型：期刊论文
| 作者 | Guo, Peiyi1,2,3; Ma, Lijun1,2,3; Ge, Qianru2,3; Shi, Jun2,3; Li, Shuxin2,3 ; Ji, Shulin1,2,3
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| 刊名 | ADVANCED MATERIALS TECHNOLOGIES
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| 出版日期 | 2024-09-04 |
| 关键词 | aqua impact etching capacitive proximity sensing micro feature size patterned silver nanowire flexible electrodes precise electrode patterning |
| ISSN号 | 2365-709X |
| DOI | 10.1002/admt.202400476 |
| 通讯作者 | Ji, Shulin(slji@issp.ac.cn) |
| 英文摘要 | Process microminiaturization is in need not only in chip field, but also in sensor-related industries. Touch panel sensors as an example have their man-machine interactive performance in high relation with the circuit resolution. Traditional etchings by yellow light or laser encounter their resolution limit of approximate to 50 mu m; moreover, former pollution using chemical etchants and latter damage to flexible substrates are inevitable. This paper demonstrates an efficient and green patterning technology for flexible silver nanowire (AgNW) transparent and conductive films, which can enable complicated patterns on various types of substrates with high resolution of a 30 mu m line width and 40 mu m line spacing. The approach uses a water-soluble photosensitive polymer as the selective protection layer to facilitate the removal of unwanted AgNWs through simple water washing. Due to its good water resistance and mechanical properties, the patterned electrodes exhibit excellent flexibility and environmental stability. As a proof of concept, a capacitive proximity sensor is designed using the patterned AgNW electrodes of the micro feature size, which exhibits excellent proximity sensing performance. The developed patterning technology paves the way to miniaturized feature sizes of different optoelectronic devices for wide applications in fields like new-style displays, man-machine interaction, IoT sensing and intelligent robots. Sensor performance relies heavily on the circuit resolution, which is limited by current process accuracy. A green patterning technology for silver nanowire films is developed to form complicated patterns on various substrates with high resolutions of a 30 mu m line width and 40 mu m line spacing. Improved optoelectronic performance as well as excellent mechanical and environmental stabilities is achieved. image |
| WOS关键词 | LIQUID IMPINGEMENT EROSION ; SILVER NANOWIRE ; STABILITY ; ADHESION ; LAYER ; ARRAY |
| 资助项目 | National Natural Science Foundation of China[52073288] ; National Natural Science Foundation of China[51771183] ; Major Science and Technology Projects[202305a12020006] ; Natural Science Foundation in Anhui Province[1708085ME118] ; HFIPS Director's Fund[YZJJ-GGZX-2022-01] |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| WOS记录号 | WOS:001303906000001 |
| 出版者 | WILEY |
| 资助机构 | National Natural Science Foundation of China ; Major Science and Technology Projects ; Natural Science Foundation in Anhui Province ; HFIPS Director's Fund |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/134951]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Ji, Shulin |
| 作者单位 | 1.Univ Sci & Technol China, Hefei 230026, Peoples R China 2.Chinese Acad Sci, Inst Solid State Phys, Hefei Inst Phys Sci, Key Lab Mat Phys, Hefei 230031, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Hefei Inst Phys Sci, Anhui Key Lab Nanomat & Nanotechnol, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo, Peiyi,Ma, Lijun,Ge, Qianru,et al. Precise Patterning of Flexible Transparent and Conductive Films without Chemical Etchings and Applications in Capacitive Proximity Sensors[J]. ADVANCED MATERIALS TECHNOLOGIES,2024. |
| APA | Guo, Peiyi,Ma, Lijun,Ge, Qianru,Shi, Jun,Li, Shuxin,&Ji, Shulin.(2024).Precise Patterning of Flexible Transparent and Conductive Films without Chemical Etchings and Applications in Capacitive Proximity Sensors.ADVANCED MATERIALS TECHNOLOGIES. |
| MLA | Guo, Peiyi,et al."Precise Patterning of Flexible Transparent and Conductive Films without Chemical Etchings and Applications in Capacitive Proximity Sensors".ADVANCED MATERIALS TECHNOLOGIES (2024). |
入库方式： OAI收割
来源：合肥物质科学研究院
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