Ultrafast-response H2S MEMS gas sensor based on double phase In2O3 monolayer particle film
文献类型：期刊论文
| 作者 | Zhang, Yanlin2; Zhang, Zheng2; Lv, Guoliang2; Zhang, Yu2; Chen, Jintao2; Luo, Yuanyuan1 ; Duan, Guotao2,3
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| 刊名 | SENSORS AND ACTUATORS B-CHEMICAL
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| 出版日期 | 2024-08-01 |
| 卷号 | 412 |
| 关键词 | Oxygen vacancy Films by self-assembly Ultrafast response H2S sensor |
| DOI | 10.1016/j.snb.2024.135787 |
| 通讯作者 | Duan, Guotao(duangt@hust.edu.cn) |
| 英文摘要 | The regulation of crystal structure plays a crucial role in gas sensing. In this work, by precisely controlling the annealing temperature, we first synthesized rhombohedral corundum-type In2O3 (h-In2O3), cubic bixbyite-type In2O3 (c-In2O3) and double phase In2O3 (c/h-In2O3). The c/h-In2O3 possesses the heterostructures of double phases, the abundant oxygen vacancies (61.1 %), and the more adsorbed oxygen (35.9 %). Subsequently, by self-assembly method, the sensors with one monolayer In2O3 particle film were successfully fabricated. The c/h-In2O3 sensor shows excellent H2S sensing performances with high response of 54.4 (50 ppm), extremely fast response time of 3.3 s and low limit of detection (LOD) of 20 ppb at 160 degrees C. The reasons for the ultrafast response of the sensor were unveiled through the comparison experiment of 4 layers particle film sensor and the theoretical analysis. Additionally, the outstanding sensing performance could be attributed to the abundant oxygen vacancies, the double phase heterojunction and the monolayer particle film. This work provides a new idea for designing micro-electro-mechanical system (MEMS) gas sensors with high sensitivity, extremely fast response, low power consumption and high level of integration. |
| WOS关键词 | SENSING PROPERTIES ; OXYGEN VACANCY ; REACTION MODEL ; NANOPARTICLES ; NANOWIRES ; CATALYSTS ; TIO2 |
| 资助项目 | National Key R & D Program of China[2020YFB2008701] |
| WOS研究方向 | Chemistry ; Electrochemistry ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:001325507300001 |
| 出版者 | ELSEVIER SCIENCE SA |
| 资助机构 | National Key R & D Program of China |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/135580]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Duan, Guotao |
| 作者单位 | 1.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, HFIPS, Hefei 230031, Peoples R China 2.Huazhong Univ Sci & Technol, Sch Integrated Circuits, Wuhan 430074, Peoples R China 3.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Yanlin,Zhang, Zheng,Lv, Guoliang,et al. Ultrafast-response H2S MEMS gas sensor based on double phase In2O3 monolayer particle film[J]. SENSORS AND ACTUATORS B-CHEMICAL,2024,412. |
| APA | Zhang, Yanlin.,Zhang, Zheng.,Lv, Guoliang.,Zhang, Yu.,Chen, Jintao.,...&Duan, Guotao.(2024).Ultrafast-response H2S MEMS gas sensor based on double phase In2O3 monolayer particle film.SENSORS AND ACTUATORS B-CHEMICAL,412. |
| MLA | Zhang, Yanlin,et al."Ultrafast-response H2S MEMS gas sensor based on double phase In2O3 monolayer particle film".SENSORS AND ACTUATORS B-CHEMICAL 412(2024). |
入库方式： OAI收割
来源：合肥物质科学研究院
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