Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing
文献类型:期刊论文
作者 | Huang, Lei1,2,3; Zhang, Qingli1,2,3![]() ![]() ![]() ![]() ![]() ![]() |
刊名 | OPTICS AND LASER TECHNOLOGY
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出版日期 | 2024-12-01 |
卷号 | 179 |
关键词 | Excimer Laser Processing Laser performance |
ISSN号 | 0030-3992 |
DOI | 10.1016/j.optlastec.2024.111138 |
通讯作者 | Zhang, Qingli(zql@aiofm.ac.cn) |
英文摘要 | The surface processing is quite important for garnet laser crystal. Excimer laser is an effective tool to exfoliate the atomic layer of surface and improve surface quality of garnet crystals. The surface morphology of Nd:GSAG crystal was improved significantly and surface impurities were removed after being surface processed by 193 nm ArF excimer laser. The surface roughness was reduced and deeper dislocations were revealed. The transmittance of crystals was increased by 6 % approximately, which is close to the theoretical value in non-absorbing band. The laser slope efficiency of 1060 nm was improved by 4.4 %. Meanwhile, the laser slope efficiencies of the processed Nd:YAG crystals at 946 nm and 1064 nm were increased by 8.0 % and 2.9 %, respectively. The results indicate that excimer laser processing can be an effective approach to improve the surface morphology and enhance the laser performance of garnet crystals. |
资助项目 | National Natural Science Foundation of China[52272011] ; Youth Innovation Pro- motion Association of CAS[2023463] ; Plan for Anhui Major Provincial Science & Technology Project[202203a05020002] |
WOS研究方向 | Optics ; Physics |
语种 | 英语 |
WOS记录号 | WOS:001253731200001 |
出版者 | ELSEVIER SCI LTD |
资助机构 | National Natural Science Foundation of China ; Youth Innovation Pro- motion Association of CAS ; Plan for Anhui Major Provincial Science & Technology Project |
源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/136385] ![]() |
专题 | 中国科学院合肥物质科学研究院 |
通讯作者 | Zhang, Qingli |
作者单位 | 1.Adv Laser Technol Lab Anhui Prov, Hefei 230037, Peoples R China 2.Univ Sci & Technol China, Sch Environm Sci & Optoelect Technol, Hefei 230026, Peoples R China 3.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei Inst Phys Sci, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China |
推荐引用方式 GB/T 7714 | Huang, Lei,Zhang, Qingli,Dou, Renqin,et al. Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing[J]. OPTICS AND LASER TECHNOLOGY,2024,179. |
APA | Huang, Lei.,Zhang, Qingli.,Dou, Renqin.,Luo, Jianqiao.,Zhang, Junrui.,...&Liu, Wenpeng.(2024).Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing.OPTICS AND LASER TECHNOLOGY,179. |
MLA | Huang, Lei,et al."Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing".OPTICS AND LASER TECHNOLOGY 179(2024). |
入库方式: OAI收割
来源:合肥物质科学研究院
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