中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing

文献类型:期刊论文

作者Huang, Lei1,2,3; Zhang, Qingli1,2,3; Dou, Renqin1,3; Luo, Jianqiao1,3; Zhang, Junrui1,2,3; Liu, Yao1,2,3; Zhang, Rui1,3; Shao, Jingzhen1,3; Sun, Guihua1,3; Liu, Wenpeng1,3
刊名OPTICS AND LASER TECHNOLOGY
出版日期2024-12-01
卷号179
关键词Excimer Laser Processing Laser performance
ISSN号0030-3992
DOI10.1016/j.optlastec.2024.111138
通讯作者Zhang, Qingli(zql@aiofm.ac.cn)
英文摘要The surface processing is quite important for garnet laser crystal. Excimer laser is an effective tool to exfoliate the atomic layer of surface and improve surface quality of garnet crystals. The surface morphology of Nd:GSAG crystal was improved significantly and surface impurities were removed after being surface processed by 193 nm ArF excimer laser. The surface roughness was reduced and deeper dislocations were revealed. The transmittance of crystals was increased by 6 % approximately, which is close to the theoretical value in non-absorbing band. The laser slope efficiency of 1060 nm was improved by 4.4 %. Meanwhile, the laser slope efficiencies of the processed Nd:YAG crystals at 946 nm and 1064 nm were increased by 8.0 % and 2.9 %, respectively. The results indicate that excimer laser processing can be an effective approach to improve the surface morphology and enhance the laser performance of garnet crystals.
资助项目National Natural Science Foundation of China[52272011] ; Youth Innovation Pro- motion Association of CAS[2023463] ; Plan for Anhui Major Provincial Science & Technology Project[202203a05020002]
WOS研究方向Optics ; Physics
语种英语
WOS记录号WOS:001253731200001
出版者ELSEVIER SCI LTD
资助机构National Natural Science Foundation of China ; Youth Innovation Pro- motion Association of CAS ; Plan for Anhui Major Provincial Science & Technology Project
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/136385]  
专题中国科学院合肥物质科学研究院
通讯作者Zhang, Qingli
作者单位1.Adv Laser Technol Lab Anhui Prov, Hefei 230037, Peoples R China
2.Univ Sci & Technol China, Sch Environm Sci & Optoelect Technol, Hefei 230026, Peoples R China
3.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei Inst Phys Sci, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China
推荐引用方式
GB/T 7714
Huang, Lei,Zhang, Qingli,Dou, Renqin,et al. Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing[J]. OPTICS AND LASER TECHNOLOGY,2024,179.
APA Huang, Lei.,Zhang, Qingli.,Dou, Renqin.,Luo, Jianqiao.,Zhang, Junrui.,...&Liu, Wenpeng.(2024).Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing.OPTICS AND LASER TECHNOLOGY,179.
MLA Huang, Lei,et al."Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing".OPTICS AND LASER TECHNOLOGY 179(2024).

入库方式: OAI收割

来源:合肥物质科学研究院

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