Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis
文献类型：期刊论文
| 作者 | Zhu,Ziyi1,2; Zhang,Shougang2; Ruan,Jun2 |
| 刊名 | Journal of Physics: Conference Series
 |
| 出版日期 | 2024-07-01 |
| 卷号 | 2800期号:1 |
| 关键词 | Precision instrumentation Circular pressure sensor Rectangular pressure sensor COMSOL simulation Performance analysis |
| ISSN号 | 1742-6588 |
| DOI | 10.1088/1742-6596/2800/1/012009 |
| 英文摘要 | Abstract Traditional sensors, such as pressure, piezoelectric or piezoresistive, mostly use square silicon-based materials as chassis and use Wheatstone bridge circuits to measure pressure and resistance values. Nowadays, reducing the size of sensors is also a problem to be solved in the increasingly wide range of sensor applications. In this paper, a circular monocrystalline silicon base pressure sensor is designed and its performance is studied. We applied COMSOL software to model the circular chassis base pressure sensor, tested the deformation of the circular chassis base pressure sensor under different access volttimes and pressures, analyzed its sensitivity and other performance, and compared the above performance with the rectangular monocrystalline silicon chassis base pressure sensor. The experimental results show that the circular monocrystalline silicon chassis pressure sensor has excellent electrostriction performance, and the variation of the potential and potential difference in the measuring area is more obvious than that of the rectangular monocrystalline silicon chassis pressure sensor. This paper provides a reference for sensor makers. |
| 语种 | 英语 |
| WOS记录号 | IOP:JPCS_2800_1_012009 |
| 出版者 | IOP Publishing |
| 源URL | [http://210.72.145.45/handle/361003/14606]  |
| 专题 | 国家授时中心_量子频标研究室 |
| 通讯作者 | Zhu,Ziyi; Zhang,Shougang; Ruan,Jun |
| 作者单位 | 1.University of Chinese Academy of Science, Beijing, China 2.National Time Service Center, Chinese Academy of Sciences, Xi’an, China |
| 推荐引用方式 GB/T 7714 | Zhu,Ziyi,Zhang,Shougang,Ruan,Jun. Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis[J]. Journal of Physics: Conference Series,2024,2800(1). |
| APA | Zhu,Ziyi,Zhang,Shougang,&Ruan,Jun.(2024).Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis.Journal of Physics: Conference Series,2800(1). |
| MLA | Zhu,Ziyi,et al."Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis".Journal of Physics: Conference Series 2800.1(2024). |
入库方式： OAI收割
来源：国家授时中心
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