Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces
文献类型：期刊论文
| 作者 | Peng, Han; Zhang, Nian; Song HX(宋恒旭); Wang L(王柳) |
| 刊名 | ACTA MECHANICA SINICA
 |
| 出版日期 | 2025-05-01 |
| 卷号 | 41期号:5页码:13 |
| 关键词 | Capacitive pressure sensor Sensitivity Micro-structured wavy surface |
| ISSN号 | 0567-7718 |
| DOI | 10.1007/s10409-024-24619-x |
| 通讯作者 | Song, Hengxu(songhengxu@imech.ac.cn) ; Wang, Liu(wangliu05@ustc.edu.cn) |
| 英文摘要 | In recent decades, capacitive pressure sensors (CPSs) with high sensitivity have demonstrated significant potential in applications such as medical monitoring, artificial intelligence, and soft robotics. Efforts to enhance this sensitivity have predominantly focused on material design and structural optimization, with surface microstructures such as wrinkles, pyramids, and micro-pillars proving effective. Although finite element modeling (FEM) has guided enhancements in CPS sensitivity across various surface designs, a theoretical understanding of sensitivity improvements remains underexplored. This paper employs sinusoidal wavy surfaces as a representative model to analytically elucidate the underlying mechanisms of sensitivity enhancement through contact mechanics. These theoretical insights are corroborated by FEM and experimental validations. Our findings underscore that optimizing material properties, such as Young's modulus and relative permittivity, alongside adjustments in surface roughness and substrate thickness, can significantly elevate the sensitivity. The optimal performance is achieved when the amplitude-to-wavelength ratio (H/lambda) is about 0.2. These results offer critical insights for designing ultrasensitive CPS devices, paving the way for advancements in sensor technology. |
| 分类号 | 二类/Q1 |
| WOS关键词 | ELASTIC BODIES ; LOW-COST ; ADHESION ; COMPLIANT ; ELECTRODE ; CONTACT ; SKIN |
| 资助项目 | National Natural Science Foundation of China[12272369] ; Strategic Priority Research Program of the Chinese Academy of Sciences[XDB0620101] |
| WOS研究方向 | Engineering ; Mechanics |
| 语种 | 英语 |
| WOS记录号 | WOS:001459828800001 |
| 资助机构 | National Natural Science Foundation of China ; Strategic Priority Research Program of the Chinese Academy of Sciences |
| 其他责任者 | 宋恒旭 ; 王柳 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/100786]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Peng, Han,Zhang, Nian,Song HX,et al. Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces[J]. ACTA MECHANICA SINICA,2025,41(5):13. |
| APA | Peng, Han,Zhang, Nian,宋恒旭,&王柳.(2025).Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces.ACTA MECHANICA SINICA,41(5),13. |
| MLA | Peng, Han,et al."Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces".ACTA MECHANICA SINICA 41.5(2025):13. |
入库方式： OAI收割
来源：力学研究所
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