Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations
文献类型：期刊论文
| 作者 | Sang, Qi; Wen, Yumei; He JW(贺建武); Gong, Shaoliang; Li, Ping; Ma, Yixin |
| 刊名 | IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
 |
| 出版日期 | 2025 |
| 卷号 | 74页码:10 |
| 关键词 | Laser interferometric displacement sensor micro-thruster multi-probe multi-probe performance evaluation performance evaluation performance evaluation |
| ISSN号 | 0018-9456 |
| DOI | 10.1109/TIM.2025.3551926 |
| 通讯作者 | Wen, Yumei(yumei.wen@sjtu.edu.cn) |
| 英文摘要 | A 4-probe laser interferometric displacement sensor (4pLIDS) has advantages over a single-probe LIDS in a micro-thruster calibration system. By synchronously measuring the displacements at four points and differentiating the measured data, the common-mode noise can be greatly suppressed, thereby improving the measurement accuracy. Based on the design requirements of the nanometer-resolution 4pLIDS, we discussed the connections among various performance aspects of LIDS, designed evaluation schemes, and conducted tests. We devised the schemes to evaluate the 4-probe performances related to synchronicity using a single nanopositioning stage as the displacement reference, and considering the agreement and output temporal uniformity from each probe. We further analyzed the influences of the non-ideal performances of the displacement reference on the evaluation results to ensure that the results truly reveal the LIDS's performances. The evaluation results show that the resolution of the 4pLIDS reaches 0.7 nm, the standard deviation (SD) of the 4pLIDS repeatability is no more than 0.15 nm and the inconsistency error among the four probes is within +/- 0.4 nm. The actual differential measurement results using the 4pLIDS conform to the predictions from the evaluated performances and demonstrate the effectiveness of the evaluation. |
| 分类号 | 一类 |
| WOS关键词 | ASSESSING AGREEMENT ; LIMITS |
| 资助项目 | National Key Research and Development Program of China[2021YFC2202800] |
| WOS研究方向 | Engineering ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:001459650800016 |
| 资助机构 | National Key Research and Development Program of China |
| 其他责任者 | Wen, Yumei |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/100807]  |
| 专题 | 力学研究所_国家微重力实验室 |
| 推荐引用方式 GB/T 7714 | Sang, Qi,Wen, Yumei,He JW,et al. Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2025,74:10. |
| APA | Sang, Qi,Wen, Yumei,贺建武,Gong, Shaoliang,Li, Ping,&Ma, Yixin.(2025).Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,74,10. |
| MLA | Sang, Qi,et al."Nanometer-Resolution 4-Probe Laser Interferometric Displacement Sensor Performance Evaluation: Principles and Operations".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 74(2025):10. |
入库方式： OAI收割
来源：力学研究所
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