Comparing internal stress in diamond-like carbon films with different structure
文献类型：期刊论文
| 作者 | Zhang JY(张俊彦) ; Liu WM(刘维民); Wang P(王鹏)
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| 刊名 | Thin Solid Films
 |
| 出版日期 | 2007 |
| 卷号 | 515页码:6899-6903 |
| 关键词 | DLC films Internal stress Ti-interlayer Ti-doping Functional gradient |
| ISSN号 | 0040-6090 |
| 通讯作者 | 刘维民 ; 张俊彦 |
| 中文摘要 | Diamond-like carbon (DLC) films with different structures were deposited on Si (100) and stainless steel substrates in a hybrid deposition system with Ar and CH4 as the feedstocks. The effects of the bias voltage, Ti-interlayer, Ti functional gradient layer and Ti-doping on the internal stress in DLC films were investigated. The results show that the internal stress in DLC films arises from both the intrinsic stress generated during the film growth and the thermal stress generated due to the mismatching of the thermal expansion coefficient between the DLC films and the substrate materials. The intrinsic stress can be released through doping titanium element at the expense of reducing the sp3/sp2 ratio. The thermal stress in DLC films can be decreased through introducing Ti-interlayer or Ti functional gradient layer. Noticeably, DLC films with very low internal stress deposited on stainless steel can be obtained through the combination of Ti-doping and Ti functional gradient layer. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Granted No: 50323007);the Innovative Group Foundation from NSFC (Grant No. 50421502);973 Project (Grant No. 2007CB607601);the “Hundred Talents Program” of the Chinese Academy of Sciences |
| 语种 | 英语 |
| WOS记录号 | WOS:000246947800038 |
| 公开日期 | 2013-11-01 |
| 源URL | [http://210.77.64.217/handle/362003/4010]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Zhang JY(张俊彦); Liu WM(刘维民) |
| 推荐引用方式 GB/T 7714 | Zhang JY,Liu WM,Wang P. Comparing internal stress in diamond-like carbon films with different structure[J]. Thin Solid Films,2007,515:6899-6903. |
| APA | 张俊彦,刘维民,&王鹏.(2007).Comparing internal stress in diamond-like carbon films with different structure.Thin Solid Films,515,6899-6903. |
| MLA | 张俊彦,et al."Comparing internal stress in diamond-like carbon films with different structure".Thin Solid Films 515(2007):6899-6903. |
入库方式： OAI收割
来源：兰州化学物理研究所
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