Structure evolution and mechanical properties enhancement of Al/AlN multilayer
文献类型：期刊论文
| 作者 | Zhang GA(张广安)
|
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2007 |
| 卷号 | 253页码:8835-8840 |
| 关键词 | Magnetron sputtering Al/AlN multilayer Structure Hardness Wear properties |
| ISSN号 | 0169-4332 |
| 通讯作者 | 阎鹏勋 |
| 中文摘要 | A set of Al/AlN multilayers with various modulation periods were prepared using DC magnetron sputtering method. Low angle X-ray diffraction (LAXRD) was used to analyze the layered structure of multilayers. The phase structure of the films was investigated with grazing angle X-ray diffraction (GAXRD). LAXRD results indicate that well-defined multilayer modulation structures are formed for the relatively larger modulation periods. However, the loss of mutilayered structure is detected in the multilayer with low modulation period. Avery wide amorphous peak is observed in multilayer with modulation period of 4 nm. The multilayers show obvious crystallization at larger modulation periods, however, the diffraction peaks are much wider than the Al single layer because of the interruption of the continuous columnar grain growth by alternating deposition processes. Nanoindentation experiments were performed to study the mechanical properties as a function of multilayer modulation period. It is found that the hardness of the multilayers is greater than the hardness calculated from rule of mixtures.With the modulation periods adjusted, the multilayers are even harder than its hard component (AlN). A maximum hardness of 24.9 GPa, about 1.9 times larger than its hard component (AlN) and 3.7 times larger than the hardness calculated from the rule of mixtures, is found at the multilayer with modulation period of 16 nm. The wear test results show that the multilayers possess lower and stable friction coefficient, and superior wear properties. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-11-01 |
| 源URL | [http://210.77.64.217/handle/362003/4102]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhang GA. Structure evolution and mechanical properties enhancement of Al/AlN multilayer[J]. Applied Surface Science,2007,253:8835-8840. |
| APA | 张广安.(2007).Structure evolution and mechanical properties enhancement of Al/AlN multilayer.Applied Surface Science,253,8835-8840. |
| MLA | 张广安."Structure evolution and mechanical properties enhancement of Al/AlN multilayer".Applied Surface Science 253(2007):8835-8840. |
入库方式： OAI收割
来源：兰州化学物理研究所
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