Nanometer-level agreement measurement and evaluation of multiple laser interferometric displacement sensor probes
文献类型：期刊论文
| 作者 | Sang, Qi3; Wen, Yumei2,3; Gong, Shaoliang3; He JW(贺建武)1 ; Li, Ping3; Ma, Yixin3
|
| 刊名 | MEASUREMENT
 |
| 出版日期 | 2025-10-01 |
| 卷号 | 254页码:8 |
| 关键词 | Agreement evaluation Displacement measurement Laser interferometric displacement sensor Multiple probes |
| ISSN号 | 0263-2241 |
| DOI | 10.1016/j.measurement.2025.117982 |
| 通讯作者 | Wen, Yumei(yumei.wen@sjtu.edu.cn) |
| 英文摘要 | In ultra-precision displacement measurement, employing multiple probes of a laser interferometric displacement sensor (LIDS) for differential measurement can significantly suppress the common-mode noises to improve the measurement quality. The efficacy of differential measurement is contingent upon the agreement among the LIDS probes. Therefore, it is crucial to scientifically evaluate this agreement. At the nanometer scale, it is challenging for multiple probes to simultaneously measure the same target and evaluate their agreement. Based on the Bland-Altman method (B-A method), we have extended the B-A method and developed a method that utilizing a single displacement reference measures and evaluates the agreement among the 4 LIDS probes. The proposed method facilitates nanometer-level quantification of multi-probe agreement. Besides, the inconsistency errors in agreement evaluation among the 4 probes were within +/- 1 nm and the differential measurements with paired probes verified the results. Furthermore, the proposed method can be extended to evaluate the agreement of any number of LIDS probes. |
| 分类号 | 一类 |
| WOS关键词 | BLAND-ALTMAN ; COMPARING METHODS ; CONFIDENCE |
| 资助项目 | National Key R & D Program of China[2021YFC2202803] |
| WOS研究方向 | Engineering ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:001502522700001 |
| 资助机构 | National Key R & D Program of China |
| 其他责任者 | Wen, Yumei |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/101781]  |
| 专题 | 力学研究所_国家微重力实验室 |
| 作者单位 | 1.Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China 2.Shanghai Jiao Tong Univ, State Key Lab Submarine Geosci, Shanghai 200240, Peoples R China; 3.Shanghai Jiao Tong Univ, Sch Automat & intelligent sensing, Shanghai 200240, Peoples R China; |
| 推荐引用方式 GB/T 7714 | Sang, Qi,Wen, Yumei,Gong, Shaoliang,et al. Nanometer-level agreement measurement and evaluation of multiple laser interferometric displacement sensor probes[J]. MEASUREMENT,2025,254:8. |
| APA | Sang, Qi,Wen, Yumei,Gong, Shaoliang,贺建武,Li, Ping,&Ma, Yixin.(2025).Nanometer-level agreement measurement and evaluation of multiple laser interferometric displacement sensor probes.MEASUREMENT,254,8. |
| MLA | Sang, Qi,et al."Nanometer-level agreement measurement and evaluation of multiple laser interferometric displacement sensor probes".MEASUREMENT 254(2025):8. |
入库方式： OAI收割
来源：力学研究所
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