Thermal analysis with high accuracy of multi-beam mask fabrication
文献类型：期刊论文
| 作者 | Zhang, Yanjun1,2,3,4; Dong, Kaijun2,3,4; Liu, Zhuming1; Chen, Delong5 |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2024-05-01 |
| 卷号 | 42期号:3页码:17 |
| ISSN号 | 2166-2746 |
| DOI | 10.1116/6.0003477 |
| 通讯作者 | Liu, Zhuming(liuzhuming@gdisit.com) |
| 英文摘要 | For a 7 nm technology node and beyond, multi-beam mask fabrication based on charged particles has attracted attention widely and shows great advantages in terms of throughput. However, the heating effect during mask writing is a serious problem and makes deformation error. To address this issue, an accurate analysis of heating with multi-beam writing is necessary. In this study, the thermal effects of electron beams on a mask during writing time (exposure time and nonexposure time) were simulated with a finite element numerical method. The variation in the temperature field with two writing paths (S-shaped and E-shaped) was analyzed. A comparative analysis of the mask's deformation under different writing paths was conducted. Numerical research shows that the thermal analysis method in this study provides a guide for optimizing the process parameters of mask fabrication. |
| WOS关键词 | FINITE-ELEMENT-ANALYSIS ; WRITER |
| 资助项目 | Special Project for Research and Development in Key areas of Guangdong Province10.13039/501100015956[2020B0101320002] ; Key-Area Research and Development Program of Guangdong Province[2020GDASYL-20200102024] ; Key-Area Research and Development Program of Guangdong Province[2022GDASZH-2022030501] ; GDAS' Project of Science and Technology Development |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:001208017700002 |
| 出版者 | A V S AMER INST PHYSICS |
| 资助机构 | Special Project for Research and Development in Key areas of Guangdong Province10.13039/501100015956 ; Key-Area Research and Development Program of Guangdong Province ; GDAS' Project of Science and Technology Development |
| 源URL | [http://ir.giec.ac.cn/handle/344007/41506]  |
| 专题 | 中国科学院广州能源研究所 |
| 通讯作者 | Liu, Zhuming |
| 作者单位 | 1.Guangdong Acad Sci, Inst Semicond, Guangzhou 510651, Guangdong, Peoples R China 2.Chinese Acad Sci, Guangzhou Inst Energy Convers, Guangzhou 510640, Guangdong, Peoples R China 3.CAS Key Lab Renewable Energy, Guangzhou 510640, Guangdong, Peoples R China 4.Guangdong Prov Key Lab New & Renewable Energy Res, Guangzhou 510640, Guangdong, Peoples R China 5.South China Normal Univ, Sch Informat & Optoelect Sci & Engn, Guangzhou 510006, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Yanjun,Dong, Kaijun,Liu, Zhuming,et al. Thermal analysis with high accuracy of multi-beam mask fabrication[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2024,42(3):17. |
| APA | Zhang, Yanjun,Dong, Kaijun,Liu, Zhuming,&Chen, Delong.(2024).Thermal analysis with high accuracy of multi-beam mask fabrication.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,42(3),17. |
| MLA | Zhang, Yanjun,et al."Thermal analysis with high accuracy of multi-beam mask fabrication".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 42.3(2024):17. |
入库方式： OAI收割
来源：广州能源研究所
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