Numerical Analysis of Theoretical Model of the Rf MEMs Switches
文献类型：期刊论文
| 作者 | Zhang LX(张立宪); Yu TX(余同希); Zhao YP(赵亚溥)
|
| 刊名 | Acta Mechanica Sinica
 |
| 出版日期 | 2004 |
| 卷号 | 20期号:2页码:178-184 |
| 通讯作者邮箱 | yzhao@lnm.imech.ac.cn |
| ISSN号 | 0567-7718 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam, and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semi-analytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given. |
| 学科主题 | 力学 |
| 类目[WOS] | Engineering, Mechanical ; Mechanics |
| 研究领域[WOS] | Engineering ; Mechanics |
| 收录类别 | SCI ; EI ; CSCD |
| 原文出处 | http://link.springer.com/article/10.1007/BF02484263 |
| 语种 | 英语 |
| WOS记录号 | WOS:000221518600011 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/16053]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang LX,Yu TX,Zhao YP. Numerical Analysis of Theoretical Model of the Rf MEMs Switches[J]. Acta Mechanica Sinica,2004,20(2):178-184. |
| APA | Zhang LX,Yu TX,&Zhao YP.(2004).Numerical Analysis of Theoretical Model of the Rf MEMs Switches.Acta Mechanica Sinica,20(2),178-184. |
| MLA | Zhang LX,et al."Numerical Analysis of Theoretical Model of the Rf MEMs Switches".Acta Mechanica Sinica 20.2(2004):178-184. |
入库方式： OAI收割
来源：力学研究所
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