The oxide dispersed strengthened (ODS) ferritic-martensitic steel was irradiated by 100MeV iron ion whose energy was degraded by using a Ta foil of 4 μm thick, 100 keV Hydrogen and 200 keV Helium at 480, 515, 550 and 580 °C. The irradiation fluences were 1×1016, 1.1×1015 and 6.8×1013/cm2, respectively for Fe, H and He. The techniques of positron annihilation lifetime and Doppler broadening of slow positron beam were utilized to examine the produced radiation damage. At 550 °C the maximal positron annihilation lifetime and S parameter of Doppler broadening were observed, implying that 550 °C is the peak temperature of swelling. The S parameter and annihilation lifetime of the sample irradiated at 515 °C by the single Fe ion beam were smaller compared to the triple beam irradiation at the same temperature, implying that the triple beam irradiation caused more severe damage than the single beam irradiation. © 2016 Trans Tech Publications, Switzerland.