Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting
文献类型：期刊论文
| 作者 | Hong, Ran; Chen, Bo; Liu, Jing; Huang, Qiyu |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2024 |
| 卷号 | 34期号:11页码:115005 |
| ISSN号 | 0960-1317 |
| DOI | 10.1088/1361-6439/ad835a |
| 文献子类 | Article |
| 电子版国际标准刊号 | 1361-6439 |
| WOS记录号 | WOS:001334740500001 |
| 源URL | [https://ir.ihep.ac.cn/handle/311005/306705]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 推荐引用方式 GB/T 7714 | Hong, Ran,Chen, Bo,Liu, Jing,et al. Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2024,34(11):115005. |
| APA | Hong, Ran,Chen, Bo,Liu, Jing,&Huang, Qiyu.(2024).Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,34(11),115005. |
| MLA | Hong, Ran,et al."Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 34.11(2024):115005. |
入库方式： OAI收割
来源：高能物理研究所
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