Influence of the edge effect of the solenoid magnetic field on the discharge process of magnetron sputtering in long and narrow chambers
文献类型：期刊论文
| 作者 | Wang, Pengcheng; Zhu, Bangle; Liu, Jiaming; Wang, Yigang; Sun, Xiaoyang; Liu, Shunming; Tan, Biao; Huang, Tao; Dong, Haiyi; Wang, Sihui |
| 刊名 | JOURNAL OF INSTRUMENTATION
 |
| 出版日期 | 2024 |
| 卷号 | 19期号:9页码:P09027 |
| ISSN号 | 1748-0221 |
| DOI | 10.1088/1748-0221/19/09/P09027 |
| 文献子类 | Article |
| WOS记录号 | WOS:001330322300001 |
| 源URL | [https://ir.ihep.ac.cn/handle/311005/306762]  |
| 专题 | 高能物理研究所_东莞分部 |
| 推荐引用方式 GB/T 7714 | Wang, Pengcheng,Zhu, Bangle,Liu, Jiaming,et al. Influence of the edge effect of the solenoid magnetic field on the discharge process of magnetron sputtering in long and narrow chambers[J]. JOURNAL OF INSTRUMENTATION,2024,19(9):P09027. |
| APA | Wang, Pengcheng.,Zhu, Bangle.,Liu, Jiaming.,Wang, Yigang.,Sun, Xiaoyang.,...&Wang, Yong.(2024).Influence of the edge effect of the solenoid magnetic field on the discharge process of magnetron sputtering in long and narrow chambers.JOURNAL OF INSTRUMENTATION,19(9),P09027. |
| MLA | Wang, Pengcheng,et al."Influence of the edge effect of the solenoid magnetic field on the discharge process of magnetron sputtering in long and narrow chambers".JOURNAL OF INSTRUMENTATION 19.9(2024):P09027. |
入库方式： OAI收割
来源：高能物理研究所
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