中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Investigation on nanocrystalline diamond film with high hardness

文献类型:期刊论文

作者Lan, Jiayi1; Li, Haixin1; Zhao, Xiao3; Liu, Lusheng2; Li, Yueli1; Song, Haozhe2; Huang, Nan2,4
刊名VACUUM
出版日期2024-08-01
卷号226页码:8
ISSN号0042-207X
DOI10.1016/j.vacuum.2024.113345
通讯作者Li, Haixin(lihaixin@hrbeu.edu.cn) ; Huang, Nan(nhuang@imr.ac.cn)
英文摘要Nanocrystalline diamond (NCD) film is widely utilized in cutting tools due to its exceptional mechanical properties, including low surface roughness and good toughness. However, it has been limited by its lower hardness. In this study, the microwave plasma chemical vapor deposition (MPCVD) technique was used to deposit NCD films on tungsten carbide-cobalt (WC -Co) substrates with different CH 4 content. The mechanical properties of NCD films were evaluated using the nanoindentation method. It was found that the hardness of NCD films reached 84 GPa at a low CH 4 content, which is attributed to its high crystal quality, high sp 3 -C content and high compressive stress. The transmission electron microscopy (TEM) was used to examine the cross-sectional microstructure of NCD films. The NCD films with high hardness were found to have partial twinning features such as twinned boundaries (TBs) inhibited dislocation motion, resulting in increased hardness. This work improves the hardness of NCD films and is important to promote the wide application of NCD films in the field of cutting tools.
资助项目Technical Innovation Project for Functional Development of Instruments and Equipment of the Chinese Academy of Sciences[sjzx-gnkf-202203] ; Science Fund of Shandong Laboratory of Advanced Materials and Green Manufacturing (Yantai)[AMGM2023F06]
WOS研究方向Materials Science ; Physics
语种英语
WOS记录号WOS:001263450800001
出版者PERGAMON-ELSEVIER SCIENCE LTD
资助机构Technical Innovation Project for Functional Development of Instruments and Equipment of the Chinese Academy of Sciences ; Science Fund of Shandong Laboratory of Advanced Materials and Green Manufacturing (Yantai)
源URL  
专题金属研究所_中国科学院金属研究所
通讯作者Li, Haixin; Huang, Nan
作者单位1.Harbin Engn Univ, Yantai Res Inst, 1 Qingdao St, Yantai 264006, Peoples R China
2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Wenhua Rd 72, Shenyang 110016, Peoples R China
3.Xian Shiyou Univ, Coll Mat Sci & Engn, Xian 710065, Peoples R China
4.Univ Sci & Technol China, Sch Mat Sci & Engn, Wenhua Rd 72, Shenyang 110016, Peoples R China
推荐引用方式
GB/T 7714
Lan, Jiayi,Li, Haixin,Zhao, Xiao,et al. Investigation on nanocrystalline diamond film with high hardness[J]. VACUUM,2024,226:8.
APA Lan, Jiayi.,Li, Haixin.,Zhao, Xiao.,Liu, Lusheng.,Li, Yueli.,...&Huang, Nan.(2024).Investigation on nanocrystalline diamond film with high hardness.VACUUM,226,8.
MLA Lan, Jiayi,et al."Investigation on nanocrystalline diamond film with high hardness".VACUUM 226(2024):8.

入库方式: OAI收割

来源:金属研究所

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