Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance
文献类型：期刊论文
| 作者 | Zhang, Yongheng1,2; Chen, Jixin1; Zhang, Hao1,2; Lei, Yiming1 |
| 刊名 | JOURNAL OF NON-CRYSTALLINE SOLIDS
 |
| 出版日期 | 2024-10-15 |
| 卷号 | 642页码:7 |
| 关键词 | Ytterbium aluminosilicate glass Bulk materials Embedding method Mechanical properties Plasma etching resistance |
| ISSN号 | 0022-3093 |
| DOI | 10.1016/j.jnoncrysol.2024.123159 |
| 通讯作者 | Chen, Jixin(jxchen@imr.ac.cn) |
| 英文摘要 | Bulk ytterbium aluminosilicate glass was prepared via boron nitride embedding using Yb2O3, Al2O3 and SiO2 powders as raw materials. The glass-forming ability, mechanical properties, thermal properties, optical properties, and plasma etching behavior of the ytterbium aluminosilicate glass were investigated. Among the investigated glass compositions, 15Yb(2)O(3)-25Al(2)O(3)-60SiO(2) (mol.%) has the best glass-forming ability. Its flexural strength, compressive strength, fracture toughness, and elastic modulus were 166 +/- 6 MPa, 1104 +/- 59 MPa, 1.3 +/- 0.1 MPa m(1/2), and 113 +/- 0.1 GPa, respectively. The as-prepared glass exhibited high glass transition temperature (847 degrees C), low thermal conductivity (0.79 W m(-1) K-1 at 25 degrees C) and good thermal stability. Furthermore, the prepared ytterbium aluminosilicate glass showed excellent fluorine plasma etching resistance owing to the generation of low volatility fluorine compounds during etching and excellent resistance to plasma sputtering. The reason for relatively low visible and infrared transmittances of the as-prepared glass was also discussed. |
| 资助项目 | Shenyang National Laboratory for Ma-terials Science, Institute of Metal Research, Chinese Academy of Science |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| WOS记录号 | WOS:001288308000001 |
| 出版者 | ELSEVIER |
| 资助机构 | Shenyang National Laboratory for Ma-terials Science, Institute of Metal Research, Chinese Academy of Science |
| 源URL |  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Chen, Jixin |
| 作者单位 | 1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Yongheng,Chen, Jixin,Zhang, Hao,et al. Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2024,642:7. |
| APA | Zhang, Yongheng,Chen, Jixin,Zhang, Hao,&Lei, Yiming.(2024).Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance.JOURNAL OF NON-CRYSTALLINE SOLIDS,642,7. |
| MLA | Zhang, Yongheng,et al."Bulk ytterbium aluminosilicate glass with excellent mechanical properties and plasma etching resistance".JOURNAL OF NON-CRYSTALLINE SOLIDS 642(2024):7. |
入库方式： OAI收割
来源：金属研究所
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