Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses
文献类型：期刊论文
| 作者 | Wang, Yuhang1; Zhao, Yang1; Wang, Shaogang2; Chen, Ji3; Zhang, Tao1; Wang, Fuhui1 |
| 刊名 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2025-05-01 |
| 卷号 | 216页码:241-259 |
| 关键词 | Semiconductor Thermodynamic calculations Anodized aluminum Sealing method Design principle |
| ISSN号 | 1005-0302 |
| DOI | 10.1016/j.jmst.2024.08.010 |
| 通讯作者 | Zhao, Yang(zhaoyang7402@mail.neu.edu.cn) ; Wang, Shaogang(wangshaogang@imr.ac.cn) |
| 英文摘要 | A principle was proposed for designing a method to seal anodized aluminum used in semiconductor processing apparatuses. Thermodynamic calculations and Fick's second law were used to reveal trends in the metal ion deposition, deposition product stability, vapor pressures of halides for selected metal ions, the holding temperature, and time. Interactions between ion concentrations and the sealing temperature were also revealed. According to the design principles, anodized aluminum dipped in 1 mM Cr3 + ion solution and steam-sealed for 18 h exhibited the highest corrosion resistance when exposed to 5 wt.% HCl solution and HCl gas, verifying the designed results. (c) 2024 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology. |
| 资助项目 | Program of the National Natural Science Foundation of China[52371055] ; Young Elite Scientist Sponsorship Program Cast[YESS20200139] ; Basic Scientific Research Project of Liaoning Provincial Department of Education[JYTMS20230618] |
| WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| WOS记录号 | WOS:001338549100001 |
| 出版者 | JOURNAL MATER SCI TECHNOL |
| 资助机构 | Program of the National Natural Science Foundation of China ; Young Elite Scientist Sponsorship Program Cast ; Basic Scientific Research Project of Liaoning Provincial Department of Education |
| 源URL |  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Zhao, Yang; Wang, Shaogang |
| 作者单位 | 1.Northeastern Univ, Corros & Protect Ctr, Shenyang 110819, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 3.Liaoning Petrochem Univ, Fushun 113001, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Yuhang,Zhao, Yang,Wang, Shaogang,et al. Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2025,216:241-259. |
| APA | Wang, Yuhang,Zhao, Yang,Wang, Shaogang,Chen, Ji,Zhang, Tao,&Wang, Fuhui.(2025).Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,216,241-259. |
| MLA | Wang, Yuhang,et al."Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 216(2025):241-259. |
入库方式： OAI收割
来源：金属研究所
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