Improving the internal stress and wear resistance of DLC film by low content Ti doping
文献类型：期刊论文
| 作者 | Qiang L(强力) ; Zhang B(张斌); Zhou Y(周妍); Zhang JY(张俊彦); Zhang JY(张俊彦)
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| 刊名 | Solid State Sciences
 |
| 出版日期 | 2013 |
| 卷号 | 20页码:17-22 |
| 关键词 | Diamond-like carbon film Low concentration Ti doping Stress Wear resistance |
| ISSN号 | 1293-2558 |
| 通讯作者 | 张俊彦 |
| 英文摘要 | Low concentration Ti-doped hydrogenated amorphous carbon (Ti-C: H) films were deposited on silicon wafers by middle frequency magnetron sputtering titanium twin-targets in the feed gas of Ar/CH4. Ti concentration was controlled by varying the gas flow ratio of Ar/CH4 to be in the range of about 0.2-0.4 at.%. X-ray photoelectron spectroscopy (XPS), Raman and high-resolution transmission electron microscope (HRTEM) were used to analyze the composition and microstructure of the films. The internal stress, mechanical and tribological properties of the films were investigated by BGS 6341 type film stress tester, nanoindentation and reciprocating ball-on-disk tribo-tester, respectively. The results indicated that the incorporated Ti probably presents in the form of atomic state since no TiC was observed. The introduction of low content Ti significantly reduced the internal stress of DLC films with slight sacrifice of the hardness, and no obvious change was observed for the internal stress and hardness as the Ti content varies in the range of 0.2e0.42 at.%. Moreover, the low content Ti incorporation enhanced the friction and wear resistance of the DLC films dramatically with wear rate of ～10_8 mm3/Nm and friction coefficient of 0.04. That is, no matter how much is Ti doping amount, the DLC film has excellent properties as long as the amount of Ti doping reaches the low content level. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Grant Nos. 51275508;51205383);the Ministry of Science and Technology of China (Grant no. 2010DFA63610);the 973 program 2013CB632300 |
| 语种 | 英语 |
| WOS记录号 | WOS:000320085100004 |
| 公开日期 | 2013-12-03 |
| 源URL | [http://210.77.64.217/handle/362003/4294]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Zhang JY(张俊彦) |
| 作者单位 | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Qiang L,Zhang B,Zhou Y,et al. Improving the internal stress and wear resistance of DLC film by low content Ti doping[J]. Solid State Sciences,2013,20:17-22. |
| APA | Qiang L,Zhang B,Zhou Y,Zhang JY,&张俊彦.(2013).Improving the internal stress and wear resistance of DLC film by low content Ti doping.Solid State Sciences,20,17-22. |
| MLA | Qiang L,et al."Improving the internal stress and wear resistance of DLC film by low content Ti doping".Solid State Sciences 20(2013):17-22. |
入库方式： OAI收割
来源：兰州化学物理研究所
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